Electrical properties of low-temperature SiO2 thin films prepared by plasma-enhanced atomic layer deposition with different plasma times
Silicon dioxide (SiO2) thin films were prepared by plasma-enhanced atomic layer deposition (PEALD) at a low temperature of 150 °C using di-isopropylaminosilane and oxygen with different plasma times. While SiO2 films deposited with a short plasma time of 0.5 s exhibited high leakage current, SiO2 fi...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
AIP Publishing LLC
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/3a9ca9665e6e4962a7ae43f995a4b659 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|