Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors
We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO<sub>2</sub>) laser to simultaneously carbonize and p...
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2021
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oai:doaj.org-article:3d3c1e89bced43a690c5407c4a7be8dc2021-11-25T18:30:08ZHierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors10.3390/nano111128282079-4991https://doaj.org/article/3d3c1e89bced43a690c5407c4a7be8dc2021-10-01T00:00:00Zhttps://www.mdpi.com/2079-4991/11/11/2828https://doaj.org/toc/2079-4991We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO<sub>2</sub>) laser to simultaneously carbonize and pattern a spin-coated black SU-8 film. Due to the high absorption of carbon blacks in black SU-8, the laser-irradiated SU-8 surface was directly exfoliated and carbonized by a fast photo-thermal reaction. Facile laser pyrolysis of black SU-8 provides a hierarchically macroporous, graphitic carbon structure with fewer defects (I<sub>D</sub>/I<sub>G</sub> = 0.19). The experimental conditions of CO<sub>2</sub> direct laser writing were optimized to fabricate high-quality LPCs for MSC electrodes with low sheet resistance and good porosity. A typical MSC based on an LPC electrode showed a large areal capacitance of 1.26 mF cm<sup>−2</sup> at a scan rate of 5 mV/s, outperforming most MSCs based on thermally pyrolyzed carbon. In addition, the results revealed that the high-resolution electrode pattern in the same footprint as that of the LPC-MSCs significantly affected the rate performance of the MSCs. Consequently, the proposed laser pyrolysis technique using black SU-8 provided simple and facile fabrication of porous, graphitic carbon electrodes for high-performance on-chip MSCs without high-temperature thermal pyrolysis.Soongeun KwonHak-Jong ChoiHyung Cheoul ShimYeoheung YoonJunhyoung AhnHyungjun LimGeehong KimKee-Bong ChoiJaeJong LeeMDPI AGarticlelaser-pyrolyzed carbondirect laser writingmicrosupercapacitorphotoresistChemistryQD1-999ENNanomaterials, Vol 11, Iss 2828, p 2828 (2021) |
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laser-pyrolyzed carbon direct laser writing microsupercapacitor photoresist Chemistry QD1-999 |
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laser-pyrolyzed carbon direct laser writing microsupercapacitor photoresist Chemistry QD1-999 Soongeun Kwon Hak-Jong Choi Hyung Cheoul Shim Yeoheung Yoon Junhyoung Ahn Hyungjun Lim Geehong Kim Kee-Bong Choi JaeJong Lee Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| description |
We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO<sub>2</sub>) laser to simultaneously carbonize and pattern a spin-coated black SU-8 film. Due to the high absorption of carbon blacks in black SU-8, the laser-irradiated SU-8 surface was directly exfoliated and carbonized by a fast photo-thermal reaction. Facile laser pyrolysis of black SU-8 provides a hierarchically macroporous, graphitic carbon structure with fewer defects (I<sub>D</sub>/I<sub>G</sub> = 0.19). The experimental conditions of CO<sub>2</sub> direct laser writing were optimized to fabricate high-quality LPCs for MSC electrodes with low sheet resistance and good porosity. A typical MSC based on an LPC electrode showed a large areal capacitance of 1.26 mF cm<sup>−2</sup> at a scan rate of 5 mV/s, outperforming most MSCs based on thermally pyrolyzed carbon. In addition, the results revealed that the high-resolution electrode pattern in the same footprint as that of the LPC-MSCs significantly affected the rate performance of the MSCs. Consequently, the proposed laser pyrolysis technique using black SU-8 provided simple and facile fabrication of porous, graphitic carbon electrodes for high-performance on-chip MSCs without high-temperature thermal pyrolysis. |
| format |
article |
| author |
Soongeun Kwon Hak-Jong Choi Hyung Cheoul Shim Yeoheung Yoon Junhyoung Ahn Hyungjun Lim Geehong Kim Kee-Bong Choi JaeJong Lee |
| author_facet |
Soongeun Kwon Hak-Jong Choi Hyung Cheoul Shim Yeoheung Yoon Junhyoung Ahn Hyungjun Lim Geehong Kim Kee-Bong Choi JaeJong Lee |
| author_sort |
Soongeun Kwon |
| title |
Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| title_short |
Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| title_full |
Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| title_fullStr |
Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| title_full_unstemmed |
Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors |
| title_sort |
hierarchically porous, laser-pyrolyzed carbon electrode from black photoresist for on-chip microsupercapacitors |
| publisher |
MDPI AG |
| publishDate |
2021 |
| url |
https://doaj.org/article/3d3c1e89bced43a690c5407c4a7be8dc |
| work_keys_str_mv |
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