Giant piezoresistive effect by optoelectronic coupling in a heterojunction

Designing reliable and sensitive mechanical sensing technologies based on piezoresistive effect remains a challenge. Here, the authors propose an opto-electro-mechanical coupling strategy to enable giant piezoresistive effect in a highly doped 3C-SiC/Si heterojunction achieving a high GF of 58,000.

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Detalles Bibliográficos
Autores principales: Thanh Nguyen, Toan Dinh, Abu Riduan Md Foisal, Hoang-Phuong Phan, Tuan-Khoa Nguyen, Nam-Trung Nguyen, Dzung Viet Dao
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2019
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Acceso en línea:https://doaj.org/article/3de7b0a7204d45adbcdfce282ae719d1
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Sumario:Designing reliable and sensitive mechanical sensing technologies based on piezoresistive effect remains a challenge. Here, the authors propose an opto-electro-mechanical coupling strategy to enable giant piezoresistive effect in a highly doped 3C-SiC/Si heterojunction achieving a high GF of 58,000.