A thermosensitive electromechanical model for detecting biological particles
Abstract Miniature electromechanical systems form a class of bioMEMS that can provide appropriate sensitivity. In this research, a thermo-electro-mechanical model is presented to detect biological particles in the microscale. Identification in the model is based on analyzing pull-in instability para...
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Main Authors: | , , |
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Format: | article |
Language: | EN |
Published: |
Nature Portfolio
2019
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Subjects: | |
Online Access: | https://doaj.org/article/407ce5a23c8448e9942b6ed80bbe1de0 |
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