A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing
Abstract The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturi...
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Nature Portfolio
2021
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oai:doaj.org-article:41b2a110b97247ea971192b1793a12952021-11-28T12:19:11ZA highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing10.1038/s41598-021-02121-52045-2322https://doaj.org/article/41b2a110b97247ea971192b1793a12952021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-02121-5https://doaj.org/toc/2045-2322Abstract The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 $$^{\circ }$$ ∘ C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 $$^{\circ }$$ ∘ C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.Daniel PopaRichard HopperSyed Zeeshan AliMatthew Thomas ColeYe FanVlad-Petru Veigang-RadulescuRohit ChikkaraddyJayakrupakar NallalaYuxin XingJack Alexander-WebberStephan HofmannAndrea De LucaJulian William GardnerFlorin UdreaNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-7 (2021) |
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Medicine R Science Q Daniel Popa Richard Hopper Syed Zeeshan Ali Matthew Thomas Cole Ye Fan Vlad-Petru Veigang-Radulescu Rohit Chikkaraddy Jayakrupakar Nallala Yuxin Xing Jack Alexander-Webber Stephan Hofmann Andrea De Luca Julian William Gardner Florin Udrea A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| description |
Abstract The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 $$^{\circ }$$ ∘ C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 $$^{\circ }$$ ∘ C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things. |
| format |
article |
| author |
Daniel Popa Richard Hopper Syed Zeeshan Ali Matthew Thomas Cole Ye Fan Vlad-Petru Veigang-Radulescu Rohit Chikkaraddy Jayakrupakar Nallala Yuxin Xing Jack Alexander-Webber Stephan Hofmann Andrea De Luca Julian William Gardner Florin Udrea |
| author_facet |
Daniel Popa Richard Hopper Syed Zeeshan Ali Matthew Thomas Cole Ye Fan Vlad-Petru Veigang-Radulescu Rohit Chikkaraddy Jayakrupakar Nallala Yuxin Xing Jack Alexander-Webber Stephan Hofmann Andrea De Luca Julian William Gardner Florin Udrea |
| author_sort |
Daniel Popa |
| title |
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| title_short |
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| title_full |
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| title_fullStr |
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| title_full_unstemmed |
A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing |
| title_sort |
highly stable, nanotube-enhanced, cmos-mems thermal emitter for mid-ir gas sensing |
| publisher |
Nature Portfolio |
| publishDate |
2021 |
| url |
https://doaj.org/article/41b2a110b97247ea971192b1793a1295 |
| work_keys_str_mv |
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