A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

Abstract The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturi...

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Bibliographic Details
Main Authors: Daniel Popa, Richard Hopper, Syed Zeeshan Ali, Matthew Thomas Cole, Ye Fan, Vlad-Petru Veigang-Radulescu, Rohit Chikkaraddy, Jayakrupakar Nallala, Yuxin Xing, Jack Alexander-Webber, Stephan Hofmann, Andrea De Luca, Julian William Gardner, Florin Udrea
Format: article
Language:EN
Published: Nature Portfolio 2021
Subjects:
Medicine
R
Science
Q
Online Access:https://doaj.org/article/41b2a110b97247ea971192b1793a1295
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