A New Low Turn-Off Loss SOI Lateral Insulated Gate Bipolar Transistor With Buried Variation of Lateral Doping Layer
In this paper, we propose a new low turn-off loss silicon-on-insulator (SOI) lateral insulated gate bipolar transistor (LIGBT) with buried variation of lateral doping (VLD) layer. The proposed device features a VLD layer inserted in the drift region, which increases the doping dose (<italic>Q&...
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| Main Authors: | , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
IEEE
2019
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| Subjects: | |
| Online Access: | https://doaj.org/article/42a379e7ba5e45bfbfcf7742447f34c9 |
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