Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths

Abstract Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measu...

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Autores principales:	Sandra Pawłowska, Jakub Gierowski, Bartłomiej Stonio, Marcin Juchniewicz, Mateusz Ficek, Michał Kruczkowski, Małgorzata Szczerska
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/42abd10275434635acf3d42065e2a97d
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spelling	oai:doaj.org-article:42abd10275434635acf3d42065e2a97d2021-11-21T12:20:36ZImplementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths10.1038/s41598-021-00195-92045-2322https://doaj.org/article/42abd10275434635acf3d42065e2a97d2021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-00195-9https://doaj.org/toc/2045-2322Abstract Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measurements. SiN layer was deposited on a standard silicon wafer with a Low-Pressure Chemical Vapor Deposition furnace. Then, the created layer was investigated using ellipsometry and scanning electron microscope. Subsequently, the mirror was used as a reflecting surface in a Fabry–Perot fiber-optic interferometer. The mirror performance was investigated for wavelengths used in telecomunication (1310 nm and 1550 nm) and then compared with results obtained with the same measurement setup, with a silver mirror instead of silicon covered with SiN, as reference. Results showed that the proposed mirror can replace the silver one with satisfying results for investigated wavelengths.Sandra PawłowskaJakub GierowskiBartłomiej StonioMarcin JuchniewiczMateusz FicekMichał KruczkowskiMałgorzata SzczerskaNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-10 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Sandra Pawłowska Jakub Gierowski Bartłomiej Stonio Marcin Juchniewicz Mateusz Ficek Michał Kruczkowski Małgorzata Szczerska Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
description	Abstract Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measurements. SiN layer was deposited on a standard silicon wafer with a Low-Pressure Chemical Vapor Deposition furnace. Then, the created layer was investigated using ellipsometry and scanning electron microscope. Subsequently, the mirror was used as a reflecting surface in a Fabry–Perot fiber-optic interferometer. The mirror performance was investigated for wavelengths used in telecomunication (1310 nm and 1550 nm) and then compared with results obtained with the same measurement setup, with a silver mirror instead of silicon covered with SiN, as reference. Results showed that the proposed mirror can replace the silver one with satisfying results for investigated wavelengths.
format	article
author	Sandra Pawłowska Jakub Gierowski Bartłomiej Stonio Marcin Juchniewicz Mateusz Ficek Michał Kruczkowski Małgorzata Szczerska
author_facet	Sandra Pawłowska Jakub Gierowski Bartłomiej Stonio Marcin Juchniewicz Mateusz Ficek Michał Kruczkowski Małgorzata Szczerska
author_sort	Sandra Pawłowska
title	Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
title_short	Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
title_full	Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
title_fullStr	Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
title_full_unstemmed	Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
title_sort	implementation of sin thin film in fiber-optic sensor working in telecommunication range of wavelengths
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/42abd10275434635acf3d42065e2a97d
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Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths

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