Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet

The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our...

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Autores principales: Hiroaki Nishikawa, Shinji Umatani, Tomofumi Mizuyama, Akihiro Hiraoka, Katsuhiro Mikami
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Publicado: MDPI AG 2021
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spelling oai:doaj.org-article:4340949a87a3434c8971876d8e834c092021-11-11T19:16:19ZGiant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet10.3390/s212173261424-8220https://doaj.org/article/4340949a87a3434c8971876d8e834c092021-11-01T00:00:00Zhttps://www.mdpi.com/1424-8220/21/21/7326https://doaj.org/toc/1424-8220The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our previous transfer process is as follows: the epitaxial BaTiO<sub>3</sub> thin films were deposited on the MgO(100). Then, the surface of the BaTiO<sub>3</sub> was adhered onto a PET sheet. Finally, only the MgO(100) substrate was dissolved in a phosphoric aqueous solution, which resulted in the transfer of the epitaxial BaTiO<sub>3</sub> thin film from the MgO(100) to a PET sheet. To establish this transfer process, our aim was to prevent any damage, such as cracks and exfoliation, during the transfer of the epitaxial functional oxides. We found that a Pt buffer layer with a ductile nature was effective for improving the quality of transferred epitaxial BaTiO<sub>3</sub> thin films. Moreover, the epitaxial BaTiO<sub>3</sub> thin films showed a drastic shrinkage of ca. 10%. The surfaces of the shrunk, epitaxial BaTiO<sub>3</sub> thin films showed giant wrinkles with a micrometer-order amplitude and a 10-μm-order periodicity without any damage. The epitaxial BaTiO<sub>3</sub> thin films with giant wrinkles, accompanied by drastic shrinkage, are similar to the thin films that are coated on a pre-stretched elastomer, which is one of the fabrication processes of stretchable devices.Hiroaki NishikawaShinji UmataniTomofumi MizuyamaAkihiro HiraokaKatsuhiro MikamiMDPI AGarticlegiant wrinkleshrinkagetransfer processBaTiO<sub>3</sub>flexible deviceChemical technologyTP1-1185ENSensors, Vol 21, Iss 7326, p 7326 (2021)
institution DOAJ
collection DOAJ
language EN
topic giant wrinkle
shrinkage
transfer process
BaTiO<sub>3</sub>
flexible device
Chemical technology
TP1-1185
spellingShingle giant wrinkle
shrinkage
transfer process
BaTiO<sub>3</sub>
flexible device
Chemical technology
TP1-1185
Hiroaki Nishikawa
Shinji Umatani
Tomofumi Mizuyama
Akihiro Hiraoka
Katsuhiro Mikami
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
description The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our previous transfer process is as follows: the epitaxial BaTiO<sub>3</sub> thin films were deposited on the MgO(100). Then, the surface of the BaTiO<sub>3</sub> was adhered onto a PET sheet. Finally, only the MgO(100) substrate was dissolved in a phosphoric aqueous solution, which resulted in the transfer of the epitaxial BaTiO<sub>3</sub> thin film from the MgO(100) to a PET sheet. To establish this transfer process, our aim was to prevent any damage, such as cracks and exfoliation, during the transfer of the epitaxial functional oxides. We found that a Pt buffer layer with a ductile nature was effective for improving the quality of transferred epitaxial BaTiO<sub>3</sub> thin films. Moreover, the epitaxial BaTiO<sub>3</sub> thin films showed a drastic shrinkage of ca. 10%. The surfaces of the shrunk, epitaxial BaTiO<sub>3</sub> thin films showed giant wrinkles with a micrometer-order amplitude and a 10-μm-order periodicity without any damage. The epitaxial BaTiO<sub>3</sub> thin films with giant wrinkles, accompanied by drastic shrinkage, are similar to the thin films that are coated on a pre-stretched elastomer, which is one of the fabrication processes of stretchable devices.
format article
author Hiroaki Nishikawa
Shinji Umatani
Tomofumi Mizuyama
Akihiro Hiraoka
Katsuhiro Mikami
author_facet Hiroaki Nishikawa
Shinji Umatani
Tomofumi Mizuyama
Akihiro Hiraoka
Katsuhiro Mikami
author_sort Hiroaki Nishikawa
title Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
title_short Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
title_full Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
title_fullStr Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
title_full_unstemmed Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
title_sort giant wrinkles on the surface of epitaxial batio<sub>3</sub> thin films with drastic shrinkage during transfer from a mgo(100) single-crystal substrate to a flexible polyethylene terephthalate sheet
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/4340949a87a3434c8971876d8e834c09
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