Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet
The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our...
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2021
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oai:doaj.org-article:4340949a87a3434c8971876d8e834c092021-11-11T19:16:19ZGiant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet10.3390/s212173261424-8220https://doaj.org/article/4340949a87a3434c8971876d8e834c092021-11-01T00:00:00Zhttps://www.mdpi.com/1424-8220/21/21/7326https://doaj.org/toc/1424-8220The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our previous transfer process is as follows: the epitaxial BaTiO<sub>3</sub> thin films were deposited on the MgO(100). Then, the surface of the BaTiO<sub>3</sub> was adhered onto a PET sheet. Finally, only the MgO(100) substrate was dissolved in a phosphoric aqueous solution, which resulted in the transfer of the epitaxial BaTiO<sub>3</sub> thin film from the MgO(100) to a PET sheet. To establish this transfer process, our aim was to prevent any damage, such as cracks and exfoliation, during the transfer of the epitaxial functional oxides. We found that a Pt buffer layer with a ductile nature was effective for improving the quality of transferred epitaxial BaTiO<sub>3</sub> thin films. Moreover, the epitaxial BaTiO<sub>3</sub> thin films showed a drastic shrinkage of ca. 10%. The surfaces of the shrunk, epitaxial BaTiO<sub>3</sub> thin films showed giant wrinkles with a micrometer-order amplitude and a 10-μm-order periodicity without any damage. The epitaxial BaTiO<sub>3</sub> thin films with giant wrinkles, accompanied by drastic shrinkage, are similar to the thin films that are coated on a pre-stretched elastomer, which is one of the fabrication processes of stretchable devices.Hiroaki NishikawaShinji UmataniTomofumi MizuyamaAkihiro HiraokaKatsuhiro MikamiMDPI AGarticlegiant wrinkleshrinkagetransfer processBaTiO<sub>3</sub>flexible deviceChemical technologyTP1-1185ENSensors, Vol 21, Iss 7326, p 7326 (2021) |
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giant wrinkle shrinkage transfer process BaTiO<sub>3</sub> flexible device Chemical technology TP1-1185 |
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giant wrinkle shrinkage transfer process BaTiO<sub>3</sub> flexible device Chemical technology TP1-1185 Hiroaki Nishikawa Shinji Umatani Tomofumi Mizuyama Akihiro Hiraoka Katsuhiro Mikami Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
description |
The transfer of ferroelectric and piezoelectric BaTiO<sub>3</sub> epitaxial thin films from an original MgO(100) single-crystal substrate to a polyethylene terephthalate (PET) sheet has been studied to fabricate <i>flexible epitaxial functional oxides</i>. The outline of our previous transfer process is as follows: the epitaxial BaTiO<sub>3</sub> thin films were deposited on the MgO(100). Then, the surface of the BaTiO<sub>3</sub> was adhered onto a PET sheet. Finally, only the MgO(100) substrate was dissolved in a phosphoric aqueous solution, which resulted in the transfer of the epitaxial BaTiO<sub>3</sub> thin film from the MgO(100) to a PET sheet. To establish this transfer process, our aim was to prevent any damage, such as cracks and exfoliation, during the transfer of the epitaxial functional oxides. We found that a Pt buffer layer with a ductile nature was effective for improving the quality of transferred epitaxial BaTiO<sub>3</sub> thin films. Moreover, the epitaxial BaTiO<sub>3</sub> thin films showed a drastic shrinkage of ca. 10%. The surfaces of the shrunk, epitaxial BaTiO<sub>3</sub> thin films showed giant wrinkles with a micrometer-order amplitude and a 10-μm-order periodicity without any damage. The epitaxial BaTiO<sub>3</sub> thin films with giant wrinkles, accompanied by drastic shrinkage, are similar to the thin films that are coated on a pre-stretched elastomer, which is one of the fabrication processes of stretchable devices. |
format |
article |
author |
Hiroaki Nishikawa Shinji Umatani Tomofumi Mizuyama Akihiro Hiraoka Katsuhiro Mikami |
author_facet |
Hiroaki Nishikawa Shinji Umatani Tomofumi Mizuyama Akihiro Hiraoka Katsuhiro Mikami |
author_sort |
Hiroaki Nishikawa |
title |
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
title_short |
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
title_full |
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
title_fullStr |
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
title_full_unstemmed |
Giant Wrinkles on the Surface of Epitaxial BaTiO<sub>3</sub> Thin Films with Drastic Shrinkage during Transfer from a MgO(100) Single-Crystal Substrate to a Flexible Polyethylene Terephthalate Sheet |
title_sort |
giant wrinkles on the surface of epitaxial batio<sub>3</sub> thin films with drastic shrinkage during transfer from a mgo(100) single-crystal substrate to a flexible polyethylene terephthalate sheet |
publisher |
MDPI AG |
publishDate |
2021 |
url |
https://doaj.org/article/4340949a87a3434c8971876d8e834c09 |
work_keys_str_mv |
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