Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings

This letter reports room-temperature electrically pumped narrow-linewidth GaN-on-Si laser diodes. Unlike conventional distributed Bragg feedback laser diodes with hundreds of gratings, we employed only a few precisely defined slot gratings to narrow the linewidth and mitigate the negative effects of...

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Autores principales: Yongjun Tang, Meixin Feng, Jianxun Liu, Shizhao Fan, Xiujian Sun, Qian Sun, Shuming Zhang, Tong Liu, Yaping Kong, Zengli Huang, Masao Ikeda, Hui Yang
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Lenguaje:EN
Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/4401b53a28884d50945985ada81b4654
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spelling oai:doaj.org-article:4401b53a28884d50945985ada81b46542021-11-25T18:32:23ZNarrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings10.3390/nano111130922079-4991https://doaj.org/article/4401b53a28884d50945985ada81b46542021-11-01T00:00:00Zhttps://www.mdpi.com/2079-4991/11/11/3092https://doaj.org/toc/2079-4991This letter reports room-temperature electrically pumped narrow-linewidth GaN-on-Si laser diodes. Unlike conventional distributed Bragg feedback laser diodes with hundreds of gratings, we employed only a few precisely defined slot gratings to narrow the linewidth and mitigate the negative effects of grating fabrication on the device performance. The slot gratings were incorporated into the ridge of conventional Fabry-Pérot cavity laser diodes. A subsequent wet etching in a tetramethyl ammonium hydroxide solution not only effectively removed the damages induced by the dry etching, but also converted the rough and tilted slot sidewalls into smooth and vertical ones. As a result, the threshold current was reduced by over 20%, and the reverse leakage current was decreased by over three orders of magnitude. Therefore, the room-temperature electrically pumped narrow-linewidth GaN-on-Si laser diode has been successfully demonstrated.Yongjun TangMeixin FengJianxun LiuShizhao FanXiujian SunQian SunShuming ZhangTong LiuYaping KongZengli HuangMasao IkedaHui YangMDPI AGarticlenarrow linewidthGaN-on-Silaser diodeIII nitride photonicsetching damageChemistryQD1-999ENNanomaterials, Vol 11, Iss 3092, p 3092 (2021)
institution DOAJ
collection DOAJ
language EN
topic narrow linewidth
GaN-on-Si
laser diode
III nitride photonics
etching damage
Chemistry
QD1-999
spellingShingle narrow linewidth
GaN-on-Si
laser diode
III nitride photonics
etching damage
Chemistry
QD1-999
Yongjun Tang
Meixin Feng
Jianxun Liu
Shizhao Fan
Xiujian Sun
Qian Sun
Shuming Zhang
Tong Liu
Yaping Kong
Zengli Huang
Masao Ikeda
Hui Yang
Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
description This letter reports room-temperature electrically pumped narrow-linewidth GaN-on-Si laser diodes. Unlike conventional distributed Bragg feedback laser diodes with hundreds of gratings, we employed only a few precisely defined slot gratings to narrow the linewidth and mitigate the negative effects of grating fabrication on the device performance. The slot gratings were incorporated into the ridge of conventional Fabry-Pérot cavity laser diodes. A subsequent wet etching in a tetramethyl ammonium hydroxide solution not only effectively removed the damages induced by the dry etching, but also converted the rough and tilted slot sidewalls into smooth and vertical ones. As a result, the threshold current was reduced by over 20%, and the reverse leakage current was decreased by over three orders of magnitude. Therefore, the room-temperature electrically pumped narrow-linewidth GaN-on-Si laser diode has been successfully demonstrated.
format article
author Yongjun Tang
Meixin Feng
Jianxun Liu
Shizhao Fan
Xiujian Sun
Qian Sun
Shuming Zhang
Tong Liu
Yaping Kong
Zengli Huang
Masao Ikeda
Hui Yang
author_facet Yongjun Tang
Meixin Feng
Jianxun Liu
Shizhao Fan
Xiujian Sun
Qian Sun
Shuming Zhang
Tong Liu
Yaping Kong
Zengli Huang
Masao Ikeda
Hui Yang
author_sort Yongjun Tang
title Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
title_short Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
title_full Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
title_fullStr Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
title_full_unstemmed Narrow-Linewidth GaN-on-Si Laser Diode with Slot Gratings
title_sort narrow-linewidth gan-on-si laser diode with slot gratings
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/4401b53a28884d50945985ada81b4654
work_keys_str_mv AT yongjuntang narrowlinewidthganonsilaserdiodewithslotgratings
AT meixinfeng narrowlinewidthganonsilaserdiodewithslotgratings
AT jianxunliu narrowlinewidthganonsilaserdiodewithslotgratings
AT shizhaofan narrowlinewidthganonsilaserdiodewithslotgratings
AT xiujiansun narrowlinewidthganonsilaserdiodewithslotgratings
AT qiansun narrowlinewidthganonsilaserdiodewithslotgratings
AT shumingzhang narrowlinewidthganonsilaserdiodewithslotgratings
AT tongliu narrowlinewidthganonsilaserdiodewithslotgratings
AT yapingkong narrowlinewidthganonsilaserdiodewithslotgratings
AT zenglihuang narrowlinewidthganonsilaserdiodewithslotgratings
AT masaoikeda narrowlinewidthganonsilaserdiodewithslotgratings
AT huiyang narrowlinewidthganonsilaserdiodewithslotgratings
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