High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane

Electronics: Microfabrication enables integrated silicon-based thin-film transistors Semiconductor-based thin-film electronics is an emerging field in modern electronics due to the advance in mechanical flexibility, yet the fabrication that is currently relied on the conventional technologies for ri...

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Bibliographic Details
Main Authors: Jung-Hun Seo, Kan Zhang, Munho Kim, Weidong Zhou, Zhenqiang Ma
Format: article
Language:EN
Published: Nature Portfolio 2017
Subjects:
Online Access:https://doaj.org/article/45b69454335f49f3909a0dc1df4356a4
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