Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates

In this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal c...

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Autores principales: Chong-Rong Huang, Hsien-Chin Chiu, Chia-Hao Liu, Hsiang-Chun Wang, Hsuan-Ling Kao, Chih-Tien Chen, Kuo-Jen Chang
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Publicado: MDPI AG 2021
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Acceso en línea:https://doaj.org/article/49ca62e52e804ee3b70050b53afafe78
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spelling oai:doaj.org-article:49ca62e52e804ee3b70050b53afafe782021-11-25T18:19:47ZCharacteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates10.3390/membranes111108482077-0375https://doaj.org/article/49ca62e52e804ee3b70050b53afafe782021-10-01T00:00:00Zhttps://www.mdpi.com/2077-0375/11/11/848https://doaj.org/toc/2077-0375In this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal conductivity of the QST substrate. Thermal imaging analysis indicated that the temperature variation of the GaN on the QST device was 4.5 °C and that of the GaN on the Si device was 9.2 °C at a drain-to-source current (<i>I</i><sub>DS</sub>) of 300 mA/mm following 50 s of operation. Compared with the GaN HEMT on the Si device, the GaN on the QST device exhibited a lower <i>I</i><sub>DS</sub> degradation at high temperatures (17.5% at 400 K). The QST substrate is suitable for employment in different temperature environments because of its high thermal stability.Chong-Rong HuangHsien-Chin ChiuChia-Hao LiuHsiang-Chun WangHsuan-Ling KaoChih-Tien ChenKuo-Jen ChangMDPI AGarticleQST substrateback-barrier layerhigh thermal conductivityChemical technologyTP1-1185Chemical engineeringTP155-156ENMembranes, Vol 11, Iss 848, p 848 (2021)
institution DOAJ
collection DOAJ
language EN
topic QST substrate
back-barrier layer
high thermal conductivity
Chemical technology
TP1-1185
Chemical engineering
TP155-156
spellingShingle QST substrate
back-barrier layer
high thermal conductivity
Chemical technology
TP1-1185
Chemical engineering
TP155-156
Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
description In this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal conductivity of the QST substrate. Thermal imaging analysis indicated that the temperature variation of the GaN on the QST device was 4.5 °C and that of the GaN on the Si device was 9.2 °C at a drain-to-source current (<i>I</i><sub>DS</sub>) of 300 mA/mm following 50 s of operation. Compared with the GaN HEMT on the Si device, the GaN on the QST device exhibited a lower <i>I</i><sub>DS</sub> degradation at high temperatures (17.5% at 400 K). The QST substrate is suitable for employment in different temperature environments because of its high thermal stability.
format article
author Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
author_facet Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
author_sort Chong-Rong Huang
title Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_short Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_full Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_fullStr Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_full_unstemmed Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_sort characteristic analysis of algan/gan hemt with composited buffer layer on high-heat dissipation poly-aln substrates
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/49ca62e52e804ee3b70050b53afafe78
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