Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental...
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| Autores principales: | , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Japanese Society of Tribologists
2011
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/4b255cc838e54ecc97c6b0ee4ec10190 |
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| Sumario: | Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental setup. Our MEMS device had Ag tips with two degree-of-freedom controlled by electrostatic actuators. Opposing tips were brought into contact using the actuator. After forming a contact, one tip was actuated laterally but slowly enough to maintain the contact between the tips. We succeeded in observing the nano-scale deformation of Ag junction in real time. |
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