Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction

Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental...

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Autores principales:	Takaaki Sato, Tadashi Ishida, Laurent Jalabert, Hiroyuki Fujita
Formato:	article
Lenguaje:	EN
Publicado:	Japanese Society of Tribologists 2011
Materias:	shear deformation ag tem observation mems Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/4b255cc838e54ecc97c6b0ee4ec10190
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id	oai:doaj.org-article:4b255cc838e54ecc97c6b0ee4ec10190
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spelling	oai:doaj.org-article:4b255cc838e54ecc97c6b0ee4ec101902021-11-05T09:25:46ZDevelopment of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction1881-219810.2474/trol.6.226https://doaj.org/article/4b255cc838e54ecc97c6b0ee4ec101902011-05-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/trol/6/5/6_5_226/_pdf/-char/enhttps://doaj.org/toc/1881-2198Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental setup. Our MEMS device had Ag tips with two degree-of-freedom controlled by electrostatic actuators. Opposing tips were brought into contact using the actuator. After forming a contact, one tip was actuated laterally but slowly enough to maintain the contact between the tips. We succeeded in observing the nano-scale deformation of Ag junction in real time.Takaaki SatoTadashi IshidaLaurent JalabertHiroyuki FujitaJapanese Society of Tribologistsarticleshear deformationagtem observationmemsPhysicsQC1-999Engineering (General). Civil engineering (General)TA1-2040Mechanical engineering and machineryTJ1-1570ChemistryQD1-999ENTribology Online, Vol 6, Iss 5, Pp 226-229 (2011)
institution	DOAJ
collection	DOAJ
language	EN
topic	shear deformation ag tem observation mems Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999
spellingShingle	shear deformation ag tem observation mems Physics QC1-999 Engineering (General). Civil engineering (General) TA1-2040 Mechanical engineering and machinery TJ1-1570 Chemistry QD1-999 Takaaki Sato Tadashi Ishida Laurent Jalabert Hiroyuki Fujita Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
description	Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental setup. Our MEMS device had Ag tips with two degree-of-freedom controlled by electrostatic actuators. Opposing tips were brought into contact using the actuator. After forming a contact, one tip was actuated laterally but slowly enough to maintain the contact between the tips. We succeeded in observing the nano-scale deformation of Ag junction in real time.
format	article
author	Takaaki Sato Tadashi Ishida Laurent Jalabert Hiroyuki Fujita
author_facet	Takaaki Sato Tadashi Ishida Laurent Jalabert Hiroyuki Fujita
author_sort	Takaaki Sato
title	Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
title_short	Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
title_full	Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
title_fullStr	Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
title_full_unstemmed	Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
title_sort	development of mems-in-tem setup to observe shear deformation for the study of nano-scale friction
publisher	Japanese Society of Tribologists
publishDate	2011
url	https://doaj.org/article/4b255cc838e54ecc97c6b0ee4ec10190
work_keys_str_mv	AT takaakisato developmentofmemsintemsetuptoobservesheardeformationforthestudyofnanoscalefriction AT tadashiishida developmentofmemsintemsetuptoobservesheardeformationforthestudyofnanoscalefriction AT laurentjalabert developmentofmemsintemsetuptoobservesheardeformationforthestudyofnanoscalefriction AT hiroyukifujita developmentofmemsintemsetuptoobservesheardeformationforthestudyofnanoscalefriction
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Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction

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