Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction
Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental...
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Formato: | article |
Lenguaje: | EN |
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Japanese Society of Tribologists
2011
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Acceso en línea: | https://doaj.org/article/4b255cc838e54ecc97c6b0ee4ec10190 |
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