High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method

In this paper, a novel self-mixing interferometer based on reflective phase modulation (RPM) method has been developed to perform micro-displacement reconstruction with nanometer accuracy. Broaden harmonic components spectrum of the self-mixing signal is produced by employing a high-frequency vibrat...

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Autores principales:	Liping Lu, Lu Hu, Zhen Li, Lirong Qiu, Wencai Huang, Xiulin Wang
Formato:	article
Lenguaje:	EN
Publicado:	IEEE 2020
Materias:	Phase modulation self-mixing interference micro-displacement measurement Electrical engineering. Electronics. Nuclear engineering TK1-9971
Acceso en línea:	https://doaj.org/article/4c6d1e8432f547baa7190bfc8b7c9de4
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id	oai:doaj.org-article:4c6d1e8432f547baa7190bfc8b7c9de4
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spelling	oai:doaj.org-article:4c6d1e8432f547baa7190bfc8b7c9de42021-11-19T00:06:24ZHigh Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method2169-353610.1109/ACCESS.2020.3036880https://doaj.org/article/4c6d1e8432f547baa7190bfc8b7c9de42020-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9252891/https://doaj.org/toc/2169-3536In this paper, a novel self-mixing interferometer based on reflective phase modulation (RPM) method has been developed to perform micro-displacement reconstruction with nanometer accuracy. Broaden harmonic components spectrum of the self-mixing signal is produced by employing a high-frequency vibrating reflective mirror as the phase modulation device. Phase demodulation is implemented applying the orthogonal demodulation algorithm subject to the signal spectrum, in which orthogonal signal can be extracted from the harmonic components of the expanded Bessel function. The principle and signal processing approach are introduced in detail, and the simulation results indicate that the reconstruction error can be reduced as the number of reflections increases. A series of experiments at different vibration amplitudes show that the reconstructed errors are all less than 10 nm with modulation frequency of 1 kHz. And the minimum error of 3 nm has been achieved at the measured amplitude of 229 nm, which demonstrates the technical-superiority and high-performance of the method.Liping LuLu HuZhen LiLirong QiuWencai HuangXiulin WangIEEEarticlePhase modulationself-mixing interferencemicro-displacement measurementElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Access, Vol 8, Pp 204153-204159 (2020)
institution	DOAJ
collection	DOAJ
language	EN
topic	Phase modulation self-mixing interference micro-displacement measurement Electrical engineering. Electronics. Nuclear engineering TK1-9971
spellingShingle	Phase modulation self-mixing interference micro-displacement measurement Electrical engineering. Electronics. Nuclear engineering TK1-9971 Liping Lu Lu Hu Zhen Li Lirong Qiu Wencai Huang Xiulin Wang High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
description	In this paper, a novel self-mixing interferometer based on reflective phase modulation (RPM) method has been developed to perform micro-displacement reconstruction with nanometer accuracy. Broaden harmonic components spectrum of the self-mixing signal is produced by employing a high-frequency vibrating reflective mirror as the phase modulation device. Phase demodulation is implemented applying the orthogonal demodulation algorithm subject to the signal spectrum, in which orthogonal signal can be extracted from the harmonic components of the expanded Bessel function. The principle and signal processing approach are introduced in detail, and the simulation results indicate that the reconstruction error can be reduced as the number of reflections increases. A series of experiments at different vibration amplitudes show that the reconstructed errors are all less than 10 nm with modulation frequency of 1 kHz. And the minimum error of 3 nm has been achieved at the measured amplitude of 229 nm, which demonstrates the technical-superiority and high-performance of the method.
format	article
author	Liping Lu Lu Hu Zhen Li Lirong Qiu Wencai Huang Xiulin Wang
author_facet	Liping Lu Lu Hu Zhen Li Lirong Qiu Wencai Huang Xiulin Wang
author_sort	Liping Lu
title	High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
title_short	High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
title_full	High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
title_fullStr	High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
title_full_unstemmed	High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method
title_sort	high precision self-mixing interferometer based on reflective phase modulation method
publisher	IEEE
publishDate	2020
url	https://doaj.org/article/4c6d1e8432f547baa7190bfc8b7c9de4
work_keys_str_mv	AT lipinglu highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod AT luhu highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod AT zhenli highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod AT lirongqiu highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod AT wencaihuang highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod AT xiulinwang highprecisionselfmixinginterferometerbasedonreflectivephasemodulationmethod
_version_	1718420607214813184

High Precision Self-Mixing Interferometer Based on Reflective Phase Modulation Method

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