Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip

This paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced w...

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Autores principales:	Meijie Liu, Yinfang Zhu, Junyuan Zhao, Lihao Wang, Jinling Yang, Fuhua Yang
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	ICP isotropic etching annealing wear-resistant PtSi tip Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/4cda81b875d74320a25dccf2f5d59eef
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spelling	oai:doaj.org-article:4cda81b875d74320a25dccf2f5d59eef2021-11-25T18:23:09ZBatch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip10.3390/mi121113262072-666Xhttps://doaj.org/article/4cda81b875d74320a25dccf2f5d59eef2021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1326https://doaj.org/toc/2072-666XThis paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced with good wafer-level uniformity using isotropic etching and thermal oxygen sharpening. The surface roughness of the etched tip post was reduced by optimized isotropic etching. The dependence of the platinum silicide morphology on annealing conditions were also systematically investigated, and conductive and wear-resistant probes with PtSi tips of curvature radii less than 30 nm were batch fabricated and applied for scanning piezoelectric samples.Meijie LiuYinfang ZhuJunyuan ZhaoLihao WangJinling YangFuhua YangMDPI AGarticleICP isotropic etchingannealingwear-resistantPtSi tipMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1326, p 1326 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	ICP isotropic etching annealing wear-resistant PtSi tip Mechanical engineering and machinery TJ1-1570
spellingShingle	ICP isotropic etching annealing wear-resistant PtSi tip Mechanical engineering and machinery TJ1-1570 Meijie Liu Yinfang Zhu Junyuan Zhao Lihao Wang Jinling Yang Fuhua Yang Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
description	This paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced with good wafer-level uniformity using isotropic etching and thermal oxygen sharpening. The surface roughness of the etched tip post was reduced by optimized isotropic etching. The dependence of the platinum silicide morphology on annealing conditions were also systematically investigated, and conductive and wear-resistant probes with PtSi tips of curvature radii less than 30 nm were batch fabricated and applied for scanning piezoelectric samples.
format	article
author	Meijie Liu Yinfang Zhu Junyuan Zhao Lihao Wang Jinling Yang Fuhua Yang
author_facet	Meijie Liu Yinfang Zhu Junyuan Zhao Lihao Wang Jinling Yang Fuhua Yang
author_sort	Meijie Liu
title	Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
title_short	Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
title_full	Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
title_fullStr	Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
title_full_unstemmed	Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
title_sort	batch fabrication of wear-resistant and conductive probe with ptsi tip
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/4cda81b875d74320a25dccf2f5d59eef
work_keys_str_mv	AT meijieliu batchfabricationofwearresistantandconductiveprobewithptsitip AT yinfangzhu batchfabricationofwearresistantandconductiveprobewithptsitip AT junyuanzhao batchfabricationofwearresistantandconductiveprobewithptsitip AT lihaowang batchfabricationofwearresistantandconductiveprobewithptsitip AT jinlingyang batchfabricationofwearresistantandconductiveprobewithptsitip AT fuhuayang batchfabricationofwearresistantandconductiveprobewithptsitip
_version_	1718411254145482752

Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip

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