Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip
This paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced w...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
MDPI AG
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/4cda81b875d74320a25dccf2f5d59eef |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|