Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that th...

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Autores principales:	Yusi Zhu, Zhan Zhao, Zhen Fang, Lidong Du
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/4db19c11e3df49cd9fdac18d51137273
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id	oai:doaj.org-article:4db19c11e3df49cd9fdac18d51137273
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spelling	oai:doaj.org-article:4db19c11e3df49cd9fdac18d511372732021-11-25T18:23:24ZDual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review10.3390/mi121113612072-666Xhttps://doaj.org/article/4db19c11e3df49cd9fdac18d511372732021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1361https://doaj.org/toc/2072-666XSingle-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.Yusi ZhuZhan ZhaoZhen FangLidong DuMDPI AGarticledual-resonator-based (DRB) MEMS sensormultiple-resonator-based (MRB) MEMS sensorstrength-coupled-resonator-based (SCRB) sensorwave-coupled-resonator-based (WCRB) sensoruncoupled-resonator-based (UCRB) sensorMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1361, p 1361 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor Mechanical engineering and machinery TJ1-1570
spellingShingle	dual-resonator-based (DRB) MEMS sensor multiple-resonator-based (MRB) MEMS sensor strength-coupled-resonator-based (SCRB) sensor wave-coupled-resonator-based (WCRB) sensor uncoupled-resonator-based (UCRB) sensor Mechanical engineering and machinery TJ1-1570 Yusi Zhu Zhan Zhao Zhen Fang Lidong Du Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
description	Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that the integration of dual or multiple resonators into a sensor has become an effective way to solve such issues. Studies have shown that dual-resonator-based (DRB) and multiple-resonator-based (MRB) MEMS sensors have the ability to reject environmental influences, and their sensitivity is tens or hundreds of times that of SRB sensors. Hence, it is worth understanding the state-of-the-art technology behind DRB and MRB MEMS sensors to promote their application in future high-end markets.
format	article
author	Yusi Zhu Zhan Zhao Zhen Fang Lidong Du
author_facet	Yusi Zhu Zhan Zhao Zhen Fang Lidong Du
author_sort	Yusi Zhu
title	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
title_short	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
title_full	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
title_fullStr	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
title_full_unstemmed	Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review
title_sort	dual-resonator-based (drb) and multiple-resonator-based (mrb) mems sensors: a review
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/4db19c11e3df49cd9fdac18d51137273
work_keys_str_mv	AT yusizhu dualresonatorbaseddrbandmultipleresonatorbasedmrbmemssensorsareview AT zhanzhao dualresonatorbaseddrbandmultipleresonatorbasedmrbmemssensorsareview AT zhenfang dualresonatorbaseddrbandmultipleresonatorbasedmrbmemssensorsareview AT lidongdu dualresonatorbaseddrbandmultipleresonatorbasedmrbmemssensorsareview
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Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

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