Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability

The drift region of conventional drain extended NMOS (DeNMOS_C) is engineered to reduce gate charge for high performance and to enhance avalanche ruggedness for reliability in switching applications. Reduced-surface-field (RESURF) techniques, including surface implant (P-Top), split-gate...

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Autores principales: Shraddha Pali, Ankur Gupta
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Publicado: IEEE 2021
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spelling oai:doaj.org-article:505780d9a5e64348bde0b9337d3258152021-11-26T00:01:41ZDesign of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability2169-353610.1109/ACCESS.2021.3128059https://doaj.org/article/505780d9a5e64348bde0b9337d3258152021-01-01T00:00:00Zhttps://ieeexplore.ieee.org/document/9614183/https://doaj.org/toc/2169-3536The drift region of conventional drain extended NMOS (DeNMOS&#x005F;C) is engineered to reduce gate charge for high performance and to enhance avalanche ruggedness for reliability in switching applications. Reduced-surface-field (RESURF) techniques, including surface implant (P-Top), split-gate (SG), and shallow trench isolation (STI), with an optimum doping implant of the drift region, are presented to improve the on-state safe operating area (SOA) and hot carrier stress (HCS) reliability of DeNMOS after the gate charge reduction. It is shown that under unclamped inductive switching (UIS) conditions, the avalanche ruggedness of optimized devices is improved, whereas DeNMOS&#x005F;C shows high susceptibility towards thermal runaway and device failure due to electrothermal effects. Switching performance shows a reduction of up to 46&#x0025; in total gate charge (<inline-formula> <tex-math notation="LaTeX">$Q_{\mathrm {g}}$ </tex-math></inline-formula>) and more than 65&#x0025; in gate-to-drain coupling charge (<inline-formula> <tex-math notation="LaTeX">$Q_{\mathrm {gd}}$ </tex-math></inline-formula>). Moreover, the highest improvement achieved in switching delay is 34&#x0025;. The high-frequency figure of merits such as FoM1 (<inline-formula> <tex-math notation="LaTeX">$R_{\mathrm {ON}}\times Q_{\mathrm {gd}}$ </tex-math></inline-formula>) and FoM2 (<inline-formula> <tex-math notation="LaTeX">$R_{\mathrm {ON}}\times Q_{\mathrm {g}}$ </tex-math></inline-formula>) show significant improvement of up to 65&#x0025; and 35&#x0025;, respectively. The tradeoff in the DC figure of merits FoM3 (<inline-formula> <tex-math notation="LaTeX">$V_{\mathrm {BD}}/R_{\mathrm {ON}})$ </tex-math></inline-formula> and Baliga-FoM (<inline-formula> <tex-math notation="LaTeX">$V_{\mathrm {BD}}^{2}/R_{\mathrm {ON}})$ </tex-math></inline-formula> are also analyzed. Comparative analysis of optimized DeNMOS structures indicates that split gate DeNMOS without STI shows a minimum degradation of DC performance and the most significant improvement in high-frequency performance and switching reliability.Shraddha PaliAnkur GuptaIEEEarticleDrain extended NMOS (DeNMOS)figure of merit (FoM)gate charge (Qg)gate-to-drain charge (Qgd.)reduced-surface-field (RESURF)switching performanceElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENIEEE Access, Vol 9, Pp 155370-155379 (2021)
institution DOAJ
collection DOAJ
language EN
topic Drain extended NMOS (DeNMOS)
figure of merit (FoM)
gate charge (Qg)
gate-to-drain charge (Qgd.)
reduced-surface-field (RESURF)
switching performance
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
spellingShingle Drain extended NMOS (DeNMOS)
figure of merit (FoM)
gate charge (Qg)
gate-to-drain charge (Qgd.)
reduced-surface-field (RESURF)
switching performance
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Shraddha Pali
Ankur Gupta
Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
description The drift region of conventional drain extended NMOS (DeNMOS&#x005F;C) is engineered to reduce gate charge for high performance and to enhance avalanche ruggedness for reliability in switching applications. Reduced-surface-field (RESURF) techniques, including surface implant (P-Top), split-gate (SG), and shallow trench isolation (STI), with an optimum doping implant of the drift region, are presented to improve the on-state safe operating area (SOA) and hot carrier stress (HCS) reliability of DeNMOS after the gate charge reduction. It is shown that under unclamped inductive switching (UIS) conditions, the avalanche ruggedness of optimized devices is improved, whereas DeNMOS&#x005F;C shows high susceptibility towards thermal runaway and device failure due to electrothermal effects. Switching performance shows a reduction of up to 46&#x0025; in total gate charge (<inline-formula> <tex-math notation="LaTeX">$Q_{\mathrm {g}}$ </tex-math></inline-formula>) and more than 65&#x0025; in gate-to-drain coupling charge (<inline-formula> <tex-math notation="LaTeX">$Q_{\mathrm {gd}}$ </tex-math></inline-formula>). Moreover, the highest improvement achieved in switching delay is 34&#x0025;. The high-frequency figure of merits such as FoM1 (<inline-formula> <tex-math notation="LaTeX">$R_{\mathrm {ON}}\times Q_{\mathrm {gd}}$ </tex-math></inline-formula>) and FoM2 (<inline-formula> <tex-math notation="LaTeX">$R_{\mathrm {ON}}\times Q_{\mathrm {g}}$ </tex-math></inline-formula>) show significant improvement of up to 65&#x0025; and 35&#x0025;, respectively. The tradeoff in the DC figure of merits FoM3 (<inline-formula> <tex-math notation="LaTeX">$V_{\mathrm {BD}}/R_{\mathrm {ON}})$ </tex-math></inline-formula> and Baliga-FoM (<inline-formula> <tex-math notation="LaTeX">$V_{\mathrm {BD}}^{2}/R_{\mathrm {ON}})$ </tex-math></inline-formula> are also analyzed. Comparative analysis of optimized DeNMOS structures indicates that split gate DeNMOS without STI shows a minimum degradation of DC performance and the most significant improvement in high-frequency performance and switching reliability.
format article
author Shraddha Pali
Ankur Gupta
author_facet Shraddha Pali
Ankur Gupta
author_sort Shraddha Pali
title Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
title_short Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
title_full Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
title_fullStr Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
title_full_unstemmed Design of Drain-Extended MOS Devices Using RESURF Techniques for High Switching Performance and Avalanche Reliability
title_sort design of drain-extended mos devices using resurf techniques for high switching performance and avalanche reliability
publisher IEEE
publishDate 2021
url https://doaj.org/article/505780d9a5e64348bde0b9337d325815
work_keys_str_mv AT shraddhapali designofdrainextendedmosdevicesusingresurftechniquesforhighswitchingperformanceandavalanchereliability
AT ankurgupta designofdrainextendedmosdevicesusingresurftechniquesforhighswitchingperformanceandavalanchereliability
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