Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer

Abstract Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO3 thin...

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Autores principales:	Phu T. P. Le, Johan E. ten Elshof, Gertjan Koster
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/52302c66105c45449732eb9c5cd736a6
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spelling	oai:doaj.org-article:52302c66105c45449732eb9c5cd736a62021-12-02T16:04:23ZEpitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer10.1038/s41598-021-91848-22045-2322https://doaj.org/article/52302c66105c45449732eb9c5cd736a62021-06-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-91848-2https://doaj.org/toc/2045-2322Abstract Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO3 thin films using Sr3Al2O6 water-sacrificial layer. The epitaxial Sr3Al2O6(011) and Sr3Al2O6(111) layers were realized on SrTiO3(011) and SrTiO3(111), respectively. Subsequently, SrRuO3 films were epitaxially grown on these sacrificial layers. The freestanding single crystalline SrRuO3(011)pc and SrRuO3(111)pc films were successfully transferred on Si substrates, demonstrating possibilities to transfer desirable oriented oxide perovskite films on Si and arbitrary substrates.Phu T. P. LeJohan E. ten ElshofGertjan KosterNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-8 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Phu T. P. Le Johan E. ten Elshof Gertjan Koster Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
description	Abstract Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO3 thin films using Sr3Al2O6 water-sacrificial layer. The epitaxial Sr3Al2O6(011) and Sr3Al2O6(111) layers were realized on SrTiO3(011) and SrTiO3(111), respectively. Subsequently, SrRuO3 films were epitaxially grown on these sacrificial layers. The freestanding single crystalline SrRuO3(011)pc and SrRuO3(111)pc films were successfully transferred on Si substrates, demonstrating possibilities to transfer desirable oriented oxide perovskite films on Si and arbitrary substrates.
format	article
author	Phu T. P. Le Johan E. ten Elshof Gertjan Koster
author_facet	Phu T. P. Le Johan E. ten Elshof Gertjan Koster
author_sort	Phu T. P. Le
title	Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
title_short	Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
title_full	Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
title_fullStr	Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
title_full_unstemmed	Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
title_sort	epitaxial lift-off of freestanding (011) and (111) srruo3 thin films using a water sacrificial layer
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/52302c66105c45449732eb9c5cd736a6
work_keys_str_mv	AT phutple epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer AT johanetenelshof epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer AT gertjankoster epitaxialliftoffoffreestanding011and111srruo3thinfilmsusingawatersacrificiallayer
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Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer

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