Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

Abstract Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF4 plasma was incorporated to improve the material quality of MgO films. Multiple material analys...

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Autores principales:	Chyuan-Haur Kao, Chia Lung Chang, Wei Ming Su, Yu Tzu Chen, Chien Cheng Lu, Yu Shan Lee, Chen Hao Hong, Chan-Yu Lin, Hsiang Chen
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/553c602f3b314ef1bd91249ea8ea6c40
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spelling	oai:doaj.org-article:553c602f3b314ef1bd91249ea8ea6c402021-12-02T15:05:59ZMagnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment10.1038/s41598-017-07699-32045-2322https://doaj.org/article/553c602f3b314ef1bd91249ea8ea6c402017-08-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-07699-3https://doaj.org/toc/2045-2322Abstract Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF4 plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF4 plasma treatment show promise for future industrial biosensing applications.Chyuan-Haur KaoChia Lung ChangWei Ming SuYu Tzu ChenChien Cheng LuYu Shan LeeChen Hao HongChan-Yu LinHsiang ChenNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-8 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Chyuan-Haur Kao Chia Lung Chang Wei Ming Su Yu Tzu Chen Chien Cheng Lu Yu Shan Lee Chen Hao Hong Chan-Yu Lin Hsiang Chen Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
description	Abstract Magnesium oxide (MgO) sensing membranes in pH-sensitive electrolyte-insulator-semiconductor structures were fabricated on silicon substrate. To optimize the sensing capability of the membrane, CF4 plasma was incorporated to improve the material quality of MgO films. Multiple material analyses including FESEM, XRD, AFM, and SIMS indicate that plasma treatment might enhance the crystallization and increase the grain size. Therefore, the sensing behaviors in terms of sensitivity, linearity, hysteresis effects, and drift rates might be improved. MgO-based EIS membranes with CF4 plasma treatment show promise for future industrial biosensing applications.
format	article
author	Chyuan-Haur Kao Chia Lung Chang Wei Ming Su Yu Tzu Chen Chien Cheng Lu Yu Shan Lee Chen Hao Hong Chan-Yu Lin Hsiang Chen
author_facet	Chyuan-Haur Kao Chia Lung Chang Wei Ming Su Yu Tzu Chen Chien Cheng Lu Yu Shan Lee Chen Hao Hong Chan-Yu Lin Hsiang Chen
author_sort	Chyuan-Haur Kao
title	Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
title_short	Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
title_full	Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
title_fullStr	Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
title_full_unstemmed	Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment
title_sort	magnesium oxide (mgo) ph-sensitive sensing membrane in electrolyte-insulator-semiconductor structures with cf4 plasma treatment
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/553c602f3b314ef1bd91249ea8ea6c40
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Magnesium Oxide (MgO) pH-sensitive Sensing Membrane in Electrolyte-Insulator-Semiconductor Structures with CF4 Plasma Treatment

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