Effect of Substrate Bias and Temperature on Friction and Wear Properties for ta-C Coating Prepared under Different Substrate Bias Voltages with Filtered Cathodic Vacuum Arc Deposition

In this paper, the tribological behaviors of 1 μm of tetrahedral amorphous carbon (ta-C) coatings deposited with a different substrate bias of -0 V, -100 V and -300 V are examined under elevated temperature up to 600°C. It is found that wear behavior could be divided into two distinct regions accord...

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Autores principales: Woo-Young Lee, Takayuki Tokoroyama, Young-Jun Jang, Noritsugu Umehara
Formato: article
Lenguaje:EN
Publicado: Japanese Society of Tribologists 2018
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Acceso en línea:https://doaj.org/article/58cb9a48811541de8d021ee4fdc35692
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Sumario:In this paper, the tribological behaviors of 1 μm of tetrahedral amorphous carbon (ta-C) coatings deposited with a different substrate bias of -0 V, -100 V and -300 V are examined under elevated temperature up to 600°C. It is found that wear behavior could be divided into two distinct regions according to testing temperature. The variation trend of the specific wear rate of ta-C coatings in region I at 23, 100 and 200°C are affected by abrasive particles which coincide with sp3 content of ta-C coatings. In region II at 300, 400 and 500°C, the transfer layer play a major role in reduction of wear rate as a function of substrate bias.