SnO2 thin film parameter influence on gas sensitive characteristics

In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thic...

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Autores principales:	Brînzari, Vladimir, Korotcenkov, Ghenadie, Dmitriev, Serghei
Formato:	article
Lenguaje:	EN
Publicado:	D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
Materias:	Physics QC1-999 Electronics TK7800-8360
Acceso en línea:	https://doaj.org/article/594a1fd903854f3eaa81598e4f0893b4
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id	oai:doaj.org-article:594a1fd903854f3eaa81598e4f0893b4
record_format	dspace
spelling	oai:doaj.org-article:594a1fd903854f3eaa81598e4f0893b42021-11-21T12:13:36ZSnO2 thin film parameter influence on gas sensitive characteristics2537-63651810-648Xhttps://doaj.org/article/594a1fd903854f3eaa81598e4f0893b42005-01-01T00:00:00Zhttps://mjps.nanotech.md/archive/2005/article/3075https://doaj.org/toc/1810-648Xhttps://doaj.org/toc/2537-6365In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thickness d and gas sensitivity S=Rgas/Rair was investigated by means of electrophysical, IR-spectroscopy and SIMS measurements. It was established that optimal spray solution s composition is 0.2M, which allows depositing of SnO2 films with required parameters: n-1018 -1019 cm-3, R=105 -106 and S>10 correspondently. Obtained results on gas sensitivity are compared with results of theoretical considerations. Brînzari, VladimirKorotcenkov, GhenadieDmitriev, SergheiD.Ghitu Institute of Electronic Engineering and NanotechnologiesarticlePhysicsQC1-999ElectronicsTK7800-8360ENMoldavian Journal of the Physical Sciences, Vol 4, Iss 1, Pp 102-105 (2005)
institution	DOAJ
collection	DOAJ
language	EN
topic	Physics QC1-999 Electronics TK7800-8360
spellingShingle	Physics QC1-999 Electronics TK7800-8360 Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei SnO2 thin film parameter influence on gas sensitive characteristics
description	In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thickness d and gas sensitivity S=Rgas/Rair was investigated by means of electrophysical, IR-spectroscopy and SIMS measurements. It was established that optimal spray solution s composition is 0.2M, which allows depositing of SnO2 films with required parameters: n-1018 -1019 cm-3, R=105 -106 and S>10 correspondently. Obtained results on gas sensitivity are compared with results of theoretical considerations.
format	article
author	Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei
author_facet	Brînzari, Vladimir Korotcenkov, Ghenadie Dmitriev, Serghei
author_sort	Brînzari, Vladimir
title	SnO2 thin film parameter influence on gas sensitive characteristics
title_short	SnO2 thin film parameter influence on gas sensitive characteristics
title_full	SnO2 thin film parameter influence on gas sensitive characteristics
title_fullStr	SnO2 thin film parameter influence on gas sensitive characteristics
title_full_unstemmed	SnO2 thin film parameter influence on gas sensitive characteristics
title_sort	sno2 thin film parameter influence on gas sensitive characteristics
publisher	D.Ghitu Institute of Electronic Engineering and Nanotechnologies
publishDate	2005
url	https://doaj.org/article/594a1fd903854f3eaa81598e4f0893b4
work_keys_str_mv	AT brinzarivladimir sno2thinfilmparameterinfluenceongassensitivecharacteristics AT korotcenkovghenadie sno2thinfilmparameterinfluenceongassensitivecharacteristics AT dmitrievserghei sno2thinfilmparameterinfluenceongassensitivecharacteristics
_version_	1718419124599652352

SnO2 thin film parameter influence on gas sensitive characteristics

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