SnO2 thin film parameter influence on gas sensitive characteristics

In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thic...

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Autores principales: Brînzari, Vladimir, Korotcenkov, Ghenadie, Dmitriev, Serghei
Formato: article
Lenguaje:EN
Publicado: D.Ghitu Institute of Electronic Engineering and Nanotechnologies 2005
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Acceso en línea:https://doaj.org/article/594a1fd903854f3eaa81598e4f0893b4
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