SnO2 thin film parameter influence on gas sensitive characteristics
In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thic...
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| Main Authors: | , , |
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| Format: | article |
| Language: | EN |
| Published: |
D.Ghitu Institute of Electronic Engineering and Nanotechnologies
2005
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| Subjects: | |
| Online Access: | https://doaj.org/article/594a1fd903854f3eaa81598e4f0893b4 |
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