Mechanical characterization and cleaning of CVD single-layer h-BN resonators

Nanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Techno...

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Autores principales:	Santiago J. Cartamil-Bueno, Matteo Cavalieri, Ruizhi Wang, Samer Houri, Stephan Hofmann, Herre S. J. van der Zant
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Materials of engineering and construction. Mechanics of materials TA401-492 Chemistry QD1-999
Acceso en línea:	https://doaj.org/article/59a75a5546394a3ea6d97b34ac32799e
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spelling	oai:doaj.org-article:59a75a5546394a3ea6d97b34ac32799e2021-12-02T14:18:34ZMechanical characterization and cleaning of CVD single-layer h-BN resonators10.1038/s41699-017-0020-82397-7132https://doaj.org/article/59a75a5546394a3ea6d97b34ac32799e2017-06-01T00:00:00Zhttps://doi.org/10.1038/s41699-017-0020-8https://doaj.org/toc/2397-7132Nanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Technology developed a technique that enables the transfer of large-area, single-layer hexagonal boron nitride films grown by chemical vapor deposition onto a substrate of choice, whilst not requiring optical visualization. Following an additional cleaning step, the atomically thin membranes were transferred onto circular microcavities patterned on a silicon oxide substrate, resulting in the formation of suspended drums. Cleaning in harsh environments using a mixture of air and ozone is instrumental to a substantial improvement in the quality factor of the drums, indicating that undesired contamination causes damping of the mechanical motion. These results show promise for the development of sensitive hexagonal boron nitride resonators.Santiago J. Cartamil-BuenoMatteo CavalieriRuizhi WangSamer HouriStephan HofmannHerre S. J. van der ZantNature PortfolioarticleMaterials of engineering and construction. Mechanics of materialsTA401-492ChemistryQD1-999ENnpj 2D Materials and Applications, Vol 1, Iss 1, Pp 1-7 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Materials of engineering and construction. Mechanics of materials TA401-492 Chemistry QD1-999
spellingShingle	Materials of engineering and construction. Mechanics of materials TA401-492 Chemistry QD1-999 Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant Mechanical characterization and cleaning of CVD single-layer h-BN resonators
description	Nanofabrication: optimized transfer enables hexagonal boron nitride mechanical resonators An improved transfer method allows easy placement of highly transparent and strongly adhesive hexagonal boron nitride on target substrates. A team led by Santiago J. Cartamil-Bueno at Delft University of Technology developed a technique that enables the transfer of large-area, single-layer hexagonal boron nitride films grown by chemical vapor deposition onto a substrate of choice, whilst not requiring optical visualization. Following an additional cleaning step, the atomically thin membranes were transferred onto circular microcavities patterned on a silicon oxide substrate, resulting in the formation of suspended drums. Cleaning in harsh environments using a mixture of air and ozone is instrumental to a substantial improvement in the quality factor of the drums, indicating that undesired contamination causes damping of the mechanical motion. These results show promise for the development of sensitive hexagonal boron nitride resonators.
format	article
author	Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant
author_facet	Santiago J. Cartamil-Bueno Matteo Cavalieri Ruizhi Wang Samer Houri Stephan Hofmann Herre S. J. van der Zant
author_sort	Santiago J. Cartamil-Bueno
title	Mechanical characterization and cleaning of CVD single-layer h-BN resonators
title_short	Mechanical characterization and cleaning of CVD single-layer h-BN resonators
title_full	Mechanical characterization and cleaning of CVD single-layer h-BN resonators
title_fullStr	Mechanical characterization and cleaning of CVD single-layer h-BN resonators
title_full_unstemmed	Mechanical characterization and cleaning of CVD single-layer h-BN resonators
title_sort	mechanical characterization and cleaning of cvd single-layer h-bn resonators
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/59a75a5546394a3ea6d97b34ac32799e
work_keys_str_mv	AT santiagojcartamilbueno mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators AT matteocavalieri mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators AT ruizhiwang mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators AT samerhouri mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators AT stephanhofmann mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators AT herresjvanderzant mechanicalcharacterizationandcleaningofcvdsinglelayerhbnresonators
_version_	1718391607551590400

Mechanical characterization and cleaning of CVD single-layer h-BN resonators

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