Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
Abstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser c...
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| Autores principales: | , , , , , , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Wiley
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/5a05deb51aad4475956f282a093c7cad |
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| Sumario: | Abstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, which allows for potentially fast measurements. A second spectral window of ±6.5 GHz was found at 850 GHz. Pointwise scanning of the difference frequency is demonstrated with thickness determination of HRFZ‐Si wafer samples as a possible application scenario. |
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