Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation

Abstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser c...

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Autores principales:	N. Surkamp, A. Gerling, J. O'Gorman, M. Honsberg, S. Schmidtmann, U. Nandi, S. Preu, J. Sacher, C. Brenner, M. R. Hofmann
Formato:	article
Lenguaje:	EN
Publicado:	Wiley 2021
Materias:	Electrical engineering. Electronics. Nuclear engineering TK1-9971
Acceso en línea:	https://doaj.org/article/5a05deb51aad4475956f282a093c7cad
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spelling	oai:doaj.org-article:5a05deb51aad4475956f282a093c7cad2021-11-19T05:42:54ZCurrent tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation1350-911X0013-519410.1049/ell2.12314https://doaj.org/article/5a05deb51aad4475956f282a093c7cad2021-11-01T00:00:00Zhttps://doi.org/10.1049/ell2.12314https://doaj.org/toc/0013-5194https://doaj.org/toc/1350-911XAbstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, which allows for potentially fast measurements. A second spectral window of ±6.5 GHz was found at 850 GHz. Pointwise scanning of the difference frequency is demonstrated with thickness determination of HRFZ‐Si wafer samples as a possible application scenario.N. SurkampA. GerlingJ. O'GormanM. HonsbergS. SchmidtmannU. NandiS. PreuJ. SacherC. BrennerM. R. HofmannWileyarticleElectrical engineering. Electronics. Nuclear engineeringTK1-9971ENElectronics Letters, Vol 57, Iss 24, Pp 936-938 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Electrical engineering. Electronics. Nuclear engineering TK1-9971
spellingShingle	Electrical engineering. Electronics. Nuclear engineering TK1-9971 N. Surkamp A. Gerling J. O'Gorman M. Honsberg S. Schmidtmann U. Nandi S. Preu J. Sacher C. Brenner M. R. Hofmann Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
description	Abstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, which allows for potentially fast measurements. A second spectral window of ±6.5 GHz was found at 850 GHz. Pointwise scanning of the difference frequency is demonstrated with thickness determination of HRFZ‐Si wafer samples as a possible application scenario.
format	article
author	N. Surkamp A. Gerling J. O'Gorman M. Honsberg S. Schmidtmann U. Nandi S. Preu J. Sacher C. Brenner M. R. Hofmann
author_facet	N. Surkamp A. Gerling J. O'Gorman M. Honsberg S. Schmidtmann U. Nandi S. Preu J. Sacher C. Brenner M. R. Hofmann
author_sort	N. Surkamp
title	Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
title_short	Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
title_full	Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
title_fullStr	Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
title_full_unstemmed	Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
title_sort	current tuned slotted y‐branch laser for wafer thickness measurements with thz radiation
publisher	Wiley
publishDate	2021
url	https://doaj.org/article/5a05deb51aad4475956f282a093c7cad
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Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation

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