Choi, D., & Shin, J. (2021). Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process. MDPI AG.
Cita Chicago Style (17a ed.)Choi, Donghyeok, y Joonghan Shin. Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution During the Laser Dopant Activation Anneal Process. MDPI AG, 2021.
Cita MLA (8a ed.)Choi, Donghyeok, y Joonghan Shin. Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution During the Laser Dopant Activation Anneal Process. MDPI AG, 2021.
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