Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8

For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time. Due to the various applications of MEAs with different types of cells and tissues, there...

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Autores principales:	Hee Soo Jeong, Seoyoung Hwang, Kyou Sik Min, Sang Beom Jun
Formato:	article
Lenguaje:	EN
Publicado:	MDPI AG 2021
Materias:	microelectrode array laser photolithography SU-8 iridium oxide Mechanical engineering and machinery TJ1-1570
Acceso en línea:	https://doaj.org/article/5bb0d81b24e74e9aaaced7afbc306a63
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spelling	oai:doaj.org-article:5bb0d81b24e74e9aaaced7afbc306a632021-11-25T18:23:18ZFabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-810.3390/mi121113472072-666Xhttps://doaj.org/article/5bb0d81b24e74e9aaaced7afbc306a632021-10-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1347https://doaj.org/toc/2072-666XFor several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time. Due to the various applications of MEAs with different types of cells and tissues, there is an increasing need to customize the electrode designs. However, the fabrication of conventional MEAs requires several microfabrication procedures of deposition, etching, and photolithography. In this study, we proposed a simple fabrication method with a laser-patterned indium tin oxide (ITO) conductor and SU-8 photoresist insulation. Unlike in a conventional metal patterning process, only the outlines of ITO conductors are ablated by laser without removing background ITO. Insulation is achieved simply via SU-8 photolithography. The electrode sites are electroplated with iridium oxide (IrO<sub>X</sub>) to improve the electrochemical properties. The fabricated MEAs are electrochemically characterized and the stability of insulation is also confirmed by impedance monitoring for three weeks. Dissociated neurons of rat hippocampi are cultured on MEAs to verify the biocompatibility and the capacity for extracellular neural recording. The electrochemical and electrophysiological results with the fabricated MEAs are similar to those from conventional SiN<sub>X</sub>-insulated MEAs. Therefore, the proposed MEA with laser-patterned ITO and SU-8 is cost-effective and equivalently feasible compared with the conventional MEAs fabricated using thin-film microfabrication techniques.Hee Soo JeongSeoyoung HwangKyou Sik MinSang Beom JunMDPI AGarticlemicroelectrode arraylaserphotolithographySU-8iridium oxideMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1347, p 1347 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	microelectrode array laser photolithography SU-8 iridium oxide Mechanical engineering and machinery TJ1-1570
spellingShingle	microelectrode array laser photolithography SU-8 iridium oxide Mechanical engineering and machinery TJ1-1570 Hee Soo Jeong Seoyoung Hwang Kyou Sik Min Sang Beom Jun Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
description	For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time. Due to the various applications of MEAs with different types of cells and tissues, there is an increasing need to customize the electrode designs. However, the fabrication of conventional MEAs requires several microfabrication procedures of deposition, etching, and photolithography. In this study, we proposed a simple fabrication method with a laser-patterned indium tin oxide (ITO) conductor and SU-8 photoresist insulation. Unlike in a conventional metal patterning process, only the outlines of ITO conductors are ablated by laser without removing background ITO. Insulation is achieved simply via SU-8 photolithography. The electrode sites are electroplated with iridium oxide (IrO<sub>X</sub>) to improve the electrochemical properties. The fabricated MEAs are electrochemically characterized and the stability of insulation is also confirmed by impedance monitoring for three weeks. Dissociated neurons of rat hippocampi are cultured on MEAs to verify the biocompatibility and the capacity for extracellular neural recording. The electrochemical and electrophysiological results with the fabricated MEAs are similar to those from conventional SiN<sub>X</sub>-insulated MEAs. Therefore, the proposed MEA with laser-patterned ITO and SU-8 is cost-effective and equivalently feasible compared with the conventional MEAs fabricated using thin-film microfabrication techniques.
format	article
author	Hee Soo Jeong Seoyoung Hwang Kyou Sik Min Sang Beom Jun
author_facet	Hee Soo Jeong Seoyoung Hwang Kyou Sik Min Sang Beom Jun
author_sort	Hee Soo Jeong
title	Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
title_short	Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
title_full	Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
title_fullStr	Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
title_full_unstemmed	Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
title_sort	fabrication of planar microelectrode array using laser-patterned ito and su-8
publisher	MDPI AG
publishDate	2021
url	https://doaj.org/article/5bb0d81b24e74e9aaaced7afbc306a63
work_keys_str_mv	AT heesoojeong fabricationofplanarmicroelectrodearrayusinglaserpatterneditoandsu8 AT seoyounghwang fabricationofplanarmicroelectrodearrayusinglaserpatterneditoandsu8 AT kyousikmin fabricationofplanarmicroelectrodearrayusinglaserpatterneditoandsu8 AT sangbeomjun fabricationofplanarmicroelectrodearrayusinglaserpatterneditoandsu8
_version_	1718411258767605760

Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8

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