Toward applications of near-field radiative heat transfer with micro-hotplates

Abstract Bringing bodies close together at sub-micron distances can drastically enhance radiative heat transfer, leading to heat fluxes greater than the blackbody limit set by Stefan–Boltzmann law. This effect, known as near-field radiative heat transfer (NFRHT), has wide implications for thermal ma...

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Autores principales:	Olivier Marconot, Alexandre Juneau-Fecteau, Luc G. Fréchette
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/5f413266858641bcb06649ce8217169a
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spelling	oai:doaj.org-article:5f413266858641bcb06649ce8217169a2021-12-02T18:30:51ZToward applications of near-field radiative heat transfer with micro-hotplates10.1038/s41598-021-93695-72045-2322https://doaj.org/article/5f413266858641bcb06649ce8217169a2021-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-93695-7https://doaj.org/toc/2045-2322Abstract Bringing bodies close together at sub-micron distances can drastically enhance radiative heat transfer, leading to heat fluxes greater than the blackbody limit set by Stefan–Boltzmann law. This effect, known as near-field radiative heat transfer (NFRHT), has wide implications for thermal management in microsystems, as well as technological applications such as direct heat to electricity conversion in thermophotovoltaic cells. Here, we demonstrate NFRHT from microfabricated hotplates made by surface micromachining of $$\hbox {SiO}_2$$ SiO 2 / $$\hbox {SiN}$$ SiN thin films deposited on a sacrificial amorphous Si layer. The sacrificial layer is dry etched to form wide membranes ( $${100}\,\upmu \hbox {m} \times {100}\,\upmu \hbox {m}$$ 100 μ m × 100 μ m ) separated from the substrate by nanometric distances. Nickel traces allow both resistive heating and temperature measurement on the micro-hotplates. We report on two samples with measured gaps of $${610}\,\hbox {nm}$$ 610 nm and $${280}\,\hbox {nm}$$ 280 nm . The membranes can be heated up to $${250}\,^{\circ }\hbox {C}$$ 250 ∘ C under vacuum with no mechanical damage. At $${120}\,^{\circ }\hbox {C}$$ 120 ∘ C we observed a 6.4-fold enhancement of radiative heat transfer compared to far-field emission for the smallest gap and a 3.5-fold enhancement for the larger gap. Furthermore, the measured transmitted power exhibits an exponential dependence with respect to gap size, a clear signature of NFRHT. Calculations of photon transmission probabilities indicate that the observed increase in heat transfer can be attributed to near-field coupling by surface phonon-polaritons supported by the $$\hbox {SiO}_2$$ SiO 2 films. The fabrication process presented here, relying solely on well-established surface micromachining technology, is a key step toward integration of NFRHT in industrial applications.Olivier MarconotAlexandre Juneau-FecteauLuc G. FréchetteNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-11 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Olivier Marconot Alexandre Juneau-Fecteau Luc G. Fréchette Toward applications of near-field radiative heat transfer with micro-hotplates
description	Abstract Bringing bodies close together at sub-micron distances can drastically enhance radiative heat transfer, leading to heat fluxes greater than the blackbody limit set by Stefan–Boltzmann law. This effect, known as near-field radiative heat transfer (NFRHT), has wide implications for thermal management in microsystems, as well as technological applications such as direct heat to electricity conversion in thermophotovoltaic cells. Here, we demonstrate NFRHT from microfabricated hotplates made by surface micromachining of $$\hbox {SiO}_2$$ SiO 2 / $$\hbox {SiN}$$ SiN thin films deposited on a sacrificial amorphous Si layer. The sacrificial layer is dry etched to form wide membranes ( $${100}\,\upmu \hbox {m} \times {100}\,\upmu \hbox {m}$$ 100 μ m × 100 μ m ) separated from the substrate by nanometric distances. Nickel traces allow both resistive heating and temperature measurement on the micro-hotplates. We report on two samples with measured gaps of $${610}\,\hbox {nm}$$ 610 nm and $${280}\,\hbox {nm}$$ 280 nm . The membranes can be heated up to $${250}\,^{\circ }\hbox {C}$$ 250 ∘ C under vacuum with no mechanical damage. At $${120}\,^{\circ }\hbox {C}$$ 120 ∘ C we observed a 6.4-fold enhancement of radiative heat transfer compared to far-field emission for the smallest gap and a 3.5-fold enhancement for the larger gap. Furthermore, the measured transmitted power exhibits an exponential dependence with respect to gap size, a clear signature of NFRHT. Calculations of photon transmission probabilities indicate that the observed increase in heat transfer can be attributed to near-field coupling by surface phonon-polaritons supported by the $$\hbox {SiO}_2$$ SiO 2 films. The fabrication process presented here, relying solely on well-established surface micromachining technology, is a key step toward integration of NFRHT in industrial applications.
format	article
author	Olivier Marconot Alexandre Juneau-Fecteau Luc G. Fréchette
author_facet	Olivier Marconot Alexandre Juneau-Fecteau Luc G. Fréchette
author_sort	Olivier Marconot
title	Toward applications of near-field radiative heat transfer with micro-hotplates
title_short	Toward applications of near-field radiative heat transfer with micro-hotplates
title_full	Toward applications of near-field radiative heat transfer with micro-hotplates
title_fullStr	Toward applications of near-field radiative heat transfer with micro-hotplates
title_full_unstemmed	Toward applications of near-field radiative heat transfer with micro-hotplates
title_sort	toward applications of near-field radiative heat transfer with micro-hotplates
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/5f413266858641bcb06649ce8217169a
work_keys_str_mv	AT oliviermarconot towardapplicationsofnearfieldradiativeheattransferwithmicrohotplates AT alexandrejuneaufecteau towardapplicationsofnearfieldradiativeheattransferwithmicrohotplates AT lucgfrechette towardapplicationsofnearfieldradiativeheattransferwithmicrohotplates
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Toward applications of near-field radiative heat transfer with micro-hotplates

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