Photonic curing of solution-deposited ZrO2 dielectric on PEN: a path towards high-throughput processing of oxide electronics
Abstract High-throughput manufacturing of oxide electronics will enable new applications ranging from large-area displays to flexible medical devices and low-cost solar panels. However, high-quality oxide films from solution-based precursors typically require 20 min or more of thermal annealing at h...
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| Main Authors: | , , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2020
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| Subjects: | |
| Online Access: | https://doaj.org/article/5f69195ac7eb4d1eaa982d2ac4dc6f41 |
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