Highly sensitive low field Lorentz-force MEMS magnetometer
Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based o...
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| Autores principales: | , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
Nature Portfolio
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b0 |
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| Sumario: | Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based on measuring the resonance frequency of the micro-beam around the buckling zone to sense out-of-plane magnetic fields. When biased with a current of 0.91 mA (around buckling), the device has a measured sensitivity of 11.6 T−1, which is five orders of magnitude larger than the state-of-the-art. The measured minimum detectable magnetic field and the estimated resolution of the proposed magnetic sensor are 100 µT and 13.6 µT.Hz−1/2, respectively. An analytical model is developed based on the Euler–Bernoulli beam theory and the Galerkin discretization to understand and verify the micro-sensor performance. Good agreement is shown between analytical results and experimental data. Furthermore, the presented magnetometer is promising for measuring very weak biomagnetic fields. |
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