Highly sensitive low field Lorentz-force MEMS magnetometer

Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based o...

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Autores principales:	Sofiane Ben Mbarek, Nouha Alcheikh, Hassen M. Ouakad, Mohammad I. Younis
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2021
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b0
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spelling	oai:doaj.org-article:61721b96c8894b2ca8ca7b42401659b02021-11-08T10:51:56ZHighly sensitive low field Lorentz-force MEMS magnetometer10.1038/s41598-021-01171-z2045-2322https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b02021-11-01T00:00:00Zhttps://doi.org/10.1038/s41598-021-01171-zhttps://doaj.org/toc/2045-2322Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based on measuring the resonance frequency of the micro-beam around the buckling zone to sense out-of-plane magnetic fields. When biased with a current of 0.91 mA (around buckling), the device has a measured sensitivity of 11.6 T−1, which is five orders of magnitude larger than the state-of-the-art. The measured minimum detectable magnetic field and the estimated resolution of the proposed magnetic sensor are 100 µT and 13.6 µT.Hz−1/2, respectively. An analytical model is developed based on the Euler–Bernoulli beam theory and the Galerkin discretization to understand and verify the micro-sensor performance. Good agreement is shown between analytical results and experimental data. Furthermore, the presented magnetometer is promising for measuring very weak biomagnetic fields.Sofiane Ben MbarekNouha AlcheikhHassen M. OuakadMohammad I. YounisNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 11, Iss 1, Pp 1-10 (2021)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Sofiane Ben Mbarek Nouha Alcheikh Hassen M. Ouakad Mohammad I. Younis Highly sensitive low field Lorentz-force MEMS magnetometer
description	Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based on measuring the resonance frequency of the micro-beam around the buckling zone to sense out-of-plane magnetic fields. When biased with a current of 0.91 mA (around buckling), the device has a measured sensitivity of 11.6 T−1, which is five orders of magnitude larger than the state-of-the-art. The measured minimum detectable magnetic field and the estimated resolution of the proposed magnetic sensor are 100 µT and 13.6 µT.Hz−1/2, respectively. An analytical model is developed based on the Euler–Bernoulli beam theory and the Galerkin discretization to understand and verify the micro-sensor performance. Good agreement is shown between analytical results and experimental data. Furthermore, the presented magnetometer is promising for measuring very weak biomagnetic fields.
format	article
author	Sofiane Ben Mbarek Nouha Alcheikh Hassen M. Ouakad Mohammad I. Younis
author_facet	Sofiane Ben Mbarek Nouha Alcheikh Hassen M. Ouakad Mohammad I. Younis
author_sort	Sofiane Ben Mbarek
title	Highly sensitive low field Lorentz-force MEMS magnetometer
title_short	Highly sensitive low field Lorentz-force MEMS magnetometer
title_full	Highly sensitive low field Lorentz-force MEMS magnetometer
title_fullStr	Highly sensitive low field Lorentz-force MEMS magnetometer
title_full_unstemmed	Highly sensitive low field Lorentz-force MEMS magnetometer
title_sort	highly sensitive low field lorentz-force mems magnetometer
publisher	Nature Portfolio
publishDate	2021
url	https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b0
work_keys_str_mv	AT sofianebenmbarek highlysensitivelowfieldlorentzforcememsmagnetometer AT nouhaalcheikh highlysensitivelowfieldlorentzforcememsmagnetometer AT hassenmouakad highlysensitivelowfieldlorentzforcememsmagnetometer AT mohammadiyounis highlysensitivelowfieldlorentzforcememsmagnetometer
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Highly sensitive low field Lorentz-force MEMS magnetometer

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