Highly sensitive low field Lorentz-force MEMS magnetometer

Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based o...

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Autores principales: Sofiane Ben Mbarek, Nouha Alcheikh, Hassen M. Ouakad, Mohammad I. Younis
Formato: article
Lenguaje:EN
Publicado: Nature Portfolio 2021
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Acceso en línea:https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b0
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