Highly sensitive low field Lorentz-force MEMS magnetometer
Abstract We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring low field values. The magnetometer consists of a silicon micro-beam sandwiched between two electrodes to electrostatically induce in-plane vibration and to detect the output current. The method is based o...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2021
|
| Subjects: | |
| Online Access: | https://doaj.org/article/61721b96c8894b2ca8ca7b42401659b0 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|