Effects of Zr/(Zr+Ti) Molar Ratio on the Phase Structure and Hardness of Ti<sub>x</sub>Zr<sub>1−x</sub>N Films
Ti<sub>x</sub>Zr<sub>1−x</sub>N hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited Ti<sub>x</sub>Zr<sub>1−x</sub>N films d...
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| Autores principales: | , , , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
MDPI AG
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/61ef184f799744dd937a82fd50eb914f |
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| Sumario: | Ti<sub>x</sub>Zr<sub>1−x</sub>N hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited Ti<sub>x</sub>Zr<sub>1−x</sub>N films displayed similar surface and fracture cross-section morphologies and thicknesses. The effects of Zr/(Zr+Ti) molar ratio on the phase composition, preferred growth orientation, and hardness of the films were discussed. The results showed that the as-deposited films had a face-centered cubic structure and exhibited the typical characteristics of substitutional solid solutions. The lattice constant of the films increased monotonically with increasing Zr/(Zr+Ti) molar ratio. Two preferred growth orientations, corresponding to the two hardness peak values, occurred symmetrically at Zr/Ti molar ratios of 40:60 and 60:40. An inflection point with a small reduction in hardness was observed at the Zr/Ti molar ratio of 50:50. |
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