Mesoscopic physical removal of material using sliding nano-diamond contacts

Abstract Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique...

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Autores principales:	Umberto Celano, Feng-Chun Hsia, Danielle Vanhaeren, Kristof Paredis, Torbjörn E. M. Nordling, Josephus G. Buijnsters, Thomas Hantschel, Wilfried Vandervorst
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2018
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/62b0818a57104af181b9c7f8b82a1cf3
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spelling	oai:doaj.org-article:62b0818a57104af181b9c7f8b82a1cf32021-12-02T15:08:02ZMesoscopic physical removal of material using sliding nano-diamond contacts10.1038/s41598-018-21171-w2045-2322https://doaj.org/article/62b0818a57104af181b9c7f8b82a1cf32018-02-01T00:00:00Zhttps://doi.org/10.1038/s41598-018-21171-whttps://doaj.org/toc/2045-2322Abstract Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique named AFM tomography or Scalpel SPM. However, the elusive laws governing nanoscale wear and the large quantity of atoms involved in the tip-sample contact, require a dedicated mesoscale description to understand and model the tip-induced material removal. Here, we study nanosized sliding contacts made of diamond in the regime whereby thousands of nm3 are removed. We explore the fundamentals of high-pressure tip-induced material removal for various materials. Changes in the load force are systematically combined with AFM and SEM to increase the understanding and the process controllability. The nonlinear variation of the removal rate with the load force is interpreted as a combination of two contact regimes each dominating in a particular force range. By using the gradual transition between the two regimes, (1) the experimental rate of material eroded on each tip passage is modeled, (2) a controllable removal rate below 5 nm/scan for all the materials is demonstrated, thus opening to future development of 3D tomographic AFM.Umberto CelanoFeng-Chun HsiaDanielle VanhaerenKristof ParedisTorbjörn E. M. NordlingJosephus G. BuijnstersThomas HantschelWilfried VandervorstNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 8, Iss 1, Pp 1-10 (2018)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Umberto Celano Feng-Chun Hsia Danielle Vanhaeren Kristof Paredis Torbjörn E. M. Nordling Josephus G. Buijnsters Thomas Hantschel Wilfried Vandervorst Mesoscopic physical removal of material using sliding nano-diamond contacts
description	Abstract Wear mechanisms including fracture and plastic deformation at the nanoscale are central to understand sliding contacts. Recently, the combination of tip-induced material erosion with the sensing capability of secondary imaging modes of AFM, has enabled a slice-and-view tomographic technique named AFM tomography or Scalpel SPM. However, the elusive laws governing nanoscale wear and the large quantity of atoms involved in the tip-sample contact, require a dedicated mesoscale description to understand and model the tip-induced material removal. Here, we study nanosized sliding contacts made of diamond in the regime whereby thousands of nm3 are removed. We explore the fundamentals of high-pressure tip-induced material removal for various materials. Changes in the load force are systematically combined with AFM and SEM to increase the understanding and the process controllability. The nonlinear variation of the removal rate with the load force is interpreted as a combination of two contact regimes each dominating in a particular force range. By using the gradual transition between the two regimes, (1) the experimental rate of material eroded on each tip passage is modeled, (2) a controllable removal rate below 5 nm/scan for all the materials is demonstrated, thus opening to future development of 3D tomographic AFM.
format	article
author	Umberto Celano Feng-Chun Hsia Danielle Vanhaeren Kristof Paredis Torbjörn E. M. Nordling Josephus G. Buijnsters Thomas Hantschel Wilfried Vandervorst
author_facet	Umberto Celano Feng-Chun Hsia Danielle Vanhaeren Kristof Paredis Torbjörn E. M. Nordling Josephus G. Buijnsters Thomas Hantschel Wilfried Vandervorst
author_sort	Umberto Celano
title	Mesoscopic physical removal of material using sliding nano-diamond contacts
title_short	Mesoscopic physical removal of material using sliding nano-diamond contacts
title_full	Mesoscopic physical removal of material using sliding nano-diamond contacts
title_fullStr	Mesoscopic physical removal of material using sliding nano-diamond contacts
title_full_unstemmed	Mesoscopic physical removal of material using sliding nano-diamond contacts
title_sort	mesoscopic physical removal of material using sliding nano-diamond contacts
publisher	Nature Portfolio
publishDate	2018
url	https://doaj.org/article/62b0818a57104af181b9c7f8b82a1cf3
work_keys_str_mv	AT umbertocelano mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT fengchunhsia mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT daniellevanhaeren mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT kristofparedis mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT torbjornemnordling mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT josephusgbuijnsters mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT thomashantschel mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts AT wilfriedvandervorst mesoscopicphysicalremovalofmaterialusingslidingnanodiamondcontacts
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Mesoscopic physical removal of material using sliding nano-diamond contacts

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