Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass

Abstract Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possibl...

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Autores principales:	Hal Emmer, Christopher T. Chen, Rebecca Saive, Dennis Friedrich, Yu Horie, Amir Arbabi, Andrei Faraon, Harry A. Atwater
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/64c60fec7ec140219b762c130adc8818
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spelling	oai:doaj.org-article:64c60fec7ec140219b762c130adc88182021-12-02T12:32:56ZFabrication of Single Crystal Gallium Phosphide Thin Films on Glass10.1038/s41598-017-05012-w2045-2322https://doaj.org/article/64c60fec7ec140219b762c130adc88182017-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-05012-whttps://doaj.org/toc/2045-2322Abstract Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possible photonic applications. In this work, we report the fabrication of single crystal gallium phosphide thin films on transparent glass substrates via transfer bonding. GaP thin films on Si (001) and (112) grown by MOCVD are bonded to glass, and then the growth substrate is removed with a XeF2 vapor etch. The resulting GaP films have surface roughnesses below 1 nm RMS and exhibit room temperature band edge photoluminescence. Magnesium doping yielded p-type films with a carrier density of 1.6 × 1017 cm−3 that exhibited mobilities as high as 16 cm2V−1s−1. Due to their unique optical properties, these films hold much promise for use in advanced optical devices.Hal EmmerChristopher T. ChenRebecca SaiveDennis FriedrichYu HorieAmir ArbabiAndrei FaraonHarry A. AtwaterNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-6 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Hal Emmer Christopher T. Chen Rebecca Saive Dennis Friedrich Yu Horie Amir Arbabi Andrei Faraon Harry A. Atwater Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
description	Abstract Due to its high refractive index and low absorption coefficient, gallium phosphide is an ideal material for photonic structures targeted at the visible wavelengths. However, these properties are only realized with high quality epitaxial growth, which limits substrate choice and thus possible photonic applications. In this work, we report the fabrication of single crystal gallium phosphide thin films on transparent glass substrates via transfer bonding. GaP thin films on Si (001) and (112) grown by MOCVD are bonded to glass, and then the growth substrate is removed with a XeF2 vapor etch. The resulting GaP films have surface roughnesses below 1 nm RMS and exhibit room temperature band edge photoluminescence. Magnesium doping yielded p-type films with a carrier density of 1.6 × 1017 cm−3 that exhibited mobilities as high as 16 cm2V−1s−1. Due to their unique optical properties, these films hold much promise for use in advanced optical devices.
format	article
author	Hal Emmer Christopher T. Chen Rebecca Saive Dennis Friedrich Yu Horie Amir Arbabi Andrei Faraon Harry A. Atwater
author_facet	Hal Emmer Christopher T. Chen Rebecca Saive Dennis Friedrich Yu Horie Amir Arbabi Andrei Faraon Harry A. Atwater
author_sort	Hal Emmer
title	Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
title_short	Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
title_full	Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
title_fullStr	Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
title_full_unstemmed	Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass
title_sort	fabrication of single crystal gallium phosphide thin films on glass
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/64c60fec7ec140219b762c130adc8818
work_keys_str_mv	AT halemmer fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT christophertchen fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT rebeccasaive fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT dennisfriedrich fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT yuhorie fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT amirarbabi fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT andreifaraon fabricationofsinglecrystalgalliumphosphidethinfilmsonglass AT harryaatwater fabricationofsinglecrystalgalliumphosphidethinfilmsonglass
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Fabrication of Single Crystal Gallium Phosphide Thin Films on Glass

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