MIMO H<sub>μ</sub> Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator
Scanning Tunneling Microscope (STM) is used to generate the surface image of any conducting sample surface with an atomic-scale resolution. A multi-axis 3D piezoelectric actuator is attached with the STM tip to move it in horizontal (x and y) and vertical (z) directions. The purpose of control desig...
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| Autores principales: | , , |
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| Formato: | article |
| Lenguaje: | EN |
| Publicado: |
IEEE
2021
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| Materias: | |
| Acceso en línea: | https://doaj.org/article/652733b7a8ad46d0b0587053c96f32e7 |
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