MIMO H<sub>&#x03BC;</sub> Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator

MIMO H<sub>&#x03BC;</sub> Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator

Scanning Tunneling Microscope (STM) is used to generate the surface image of any conducting sample surface with an atomic-scale resolution. A multi-axis 3D piezoelectric actuator is attached with the STM tip to move it in horizontal (x and y) and vertical (z) directions. The purpose of control desig...

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Bibliographic Details
Main Authors: Irfan Ahmad, Amro Emad Awad Ali, Yasser Bin Salamah
Format: article
Language:EN
Published: IEEE 2021
Subjects:
Cross-coupling
feedforward compensator
hysteresis
MIMO Hμ feedback controller
scanning tunneling microscope
Electrical engineering. Electronics. Nuclear engineering
TK1-9971
Online Access:https://doaj.org/article/652733b7a8ad46d0b0587053c96f32e7
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https://doaj.org/article/652733b7a8ad46d0b0587053c96f32e7

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