Resolution enhancement in scanning electron microscopy using deep learning
Abstract We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in low-resolution SEM images and comparing them with the...
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Main Authors: | Kevin de Haan, Zachary S. Ballard, Yair Rivenson, Yichen Wu, Aydogan Ozcan |
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Format: | article |
Language: | EN |
Published: |
Nature Portfolio
2019
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Subjects: | |
Online Access: | https://doaj.org/article/67a6f65d728340228b53d78e8e54f33f |
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