Resolution enhancement in scanning electron microscopy using deep learning

Abstract We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in low-resolution SEM images and comparing them with the...

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Bibliographic Details
Main Authors: Kevin de Haan, Zachary S. Ballard, Yair Rivenson, Yichen Wu, Aydogan Ozcan
Format: article
Language:EN
Published: Nature Portfolio 2019
Subjects:
R
Q
Online Access:https://doaj.org/article/67a6f65d728340228b53d78e8e54f33f
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