APA (7th ed.) Citation

Enisherlova, K. L., Seidman, L. A., Temper, E. M., & Kontsevoy, Y. A. (2021). Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures. Pensoft Publishers.

Chicago Style (17th ed.) Citation

Enisherlova, Kira L., Lev A. Seidman, Ella M. Temper, and Yuliy A. Kontsevoy. Effect of PECVD SiNx Deposition Process Parameters on Electrical Properties of SiNx/AlGaN/GaN Structures. Pensoft Publishers, 2021.

MLA (8th ed.) Citation

Enisherlova, Kira L., et al. Effect of PECVD SiNx Deposition Process Parameters on Electrical Properties of SiNx/AlGaN/GaN Structures. Pensoft Publishers, 2021.