Cita APA (7a ed.)

Enisherlova, K. L., Seidman, L. A., Temper, E. M., & Kontsevoy, Y. A. (2021). Effect of PECVD SiNx deposition process parameters on electrical properties of SiNx/AlGaN/GaN structures. Pensoft Publishers.

Cita Chicago Style (17a ed.)

Enisherlova, Kira L., Lev A. Seidman, Ella M. Temper, y Yuliy A. Kontsevoy. Effect of PECVD SiNx Deposition Process Parameters on Electrical Properties of SiNx/AlGaN/GaN Structures. Pensoft Publishers, 2021.

Cita MLA (8a ed.)

Enisherlova, Kira L., et al. Effect of PECVD SiNx Deposition Process Parameters on Electrical Properties of SiNx/AlGaN/GaN Structures. Pensoft Publishers, 2021.