Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

Abstract Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light,...

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Autores principales:	Yasser Fuentes-Edfuf, Mario Garcia-Lechuga, Daniel Puerto, Camilo Florian, Adianez Garcia-Leis, Santiago Sanchez-Cortes, Javier Solis, Jan Siegel
Formato:	article
Lenguaje:	EN
Publicado:	Nature Portfolio 2017
Materias:	Medicine R Science Q
Acceso en línea:	https://doaj.org/article/6b1bda615e614f61a62370597ebe69b2
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spelling	oai:doaj.org-article:6b1bda615e614f61a62370597ebe69b22021-12-02T16:06:37ZCoherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses10.1038/s41598-017-04891-32045-2322https://doaj.org/article/6b1bda615e614f61a62370597ebe69b22017-07-01T00:00:00Zhttps://doi.org/10.1038/s41598-017-04891-3https://doaj.org/toc/2045-2322Abstract Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading to local melting at the interference maxima, as demonstrated by femtosecond microscopy. Exploiting this strategy, lines of highly regular amorphous fringes can be written. The fringes have been characterized in detail using optical microscopy combined modelling, which enables a determination of the three-dimensional shape of individual fringes. 2D micro-Raman spectroscopy reveals that the space between amorphous fringes remains crystalline. We demonstrate that the fringe period can be tuned over a range of 410 nm – 13 µm by changing the angle of incidence and inverting the beam scan direction. Fine control over the lateral dimensions, thickness, surface depression and optical contrast of the fringes is obtained via adjustment of pulse number, fluence and spot size. Large-area, highly homogeneous gratings composed of amorphous fringes with micrometer width and millimeter length can readily be fabricated. The here presented fabrication technique is expected to have applications in the fields of optics, nanoelectronics, and mechatronics and should be applicable to other materials.Yasser Fuentes-EdfufMario Garcia-LechugaDaniel PuertoCamilo FlorianAdianez Garcia-LeisSantiago Sanchez-CortesJavier SolisJan SiegelNature PortfolioarticleMedicineRScienceQENScientific Reports, Vol 7, Iss 1, Pp 1-12 (2017)
institution	DOAJ
collection	DOAJ
language	EN
topic	Medicine R Science Q
spellingShingle	Medicine R Science Q Yasser Fuentes-Edfuf Mario Garcia-Lechuga Daniel Puerto Camilo Florian Adianez Garcia-Leis Santiago Sanchez-Cortes Javier Solis Jan Siegel Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
description	Abstract Periodic structures of alternating amorphous-crystalline fringes have been fabricated in silicon using repetitive femtosecond laser exposure (800 nm wavelength and 120 fs duration). The method is based on the interference of the incident laser light with far- and near-field scattered light, leading to local melting at the interference maxima, as demonstrated by femtosecond microscopy. Exploiting this strategy, lines of highly regular amorphous fringes can be written. The fringes have been characterized in detail using optical microscopy combined modelling, which enables a determination of the three-dimensional shape of individual fringes. 2D micro-Raman spectroscopy reveals that the space between amorphous fringes remains crystalline. We demonstrate that the fringe period can be tuned over a range of 410 nm – 13 µm by changing the angle of incidence and inverting the beam scan direction. Fine control over the lateral dimensions, thickness, surface depression and optical contrast of the fringes is obtained via adjustment of pulse number, fluence and spot size. Large-area, highly homogeneous gratings composed of amorphous fringes with micrometer width and millimeter length can readily be fabricated. The here presented fabrication technique is expected to have applications in the fields of optics, nanoelectronics, and mechatronics and should be applicable to other materials.
format	article
author	Yasser Fuentes-Edfuf Mario Garcia-Lechuga Daniel Puerto Camilo Florian Adianez Garcia-Leis Santiago Sanchez-Cortes Javier Solis Jan Siegel
author_facet	Yasser Fuentes-Edfuf Mario Garcia-Lechuga Daniel Puerto Camilo Florian Adianez Garcia-Leis Santiago Sanchez-Cortes Javier Solis Jan Siegel
author_sort	Yasser Fuentes-Edfuf
title	Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_short	Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_full	Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_fullStr	Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_full_unstemmed	Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
title_sort	coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses
publisher	Nature Portfolio
publishDate	2017
url	https://doaj.org/article/6b1bda615e614f61a62370597ebe69b2
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Coherent scatter-controlled phase-change grating structures in silicon using femtosecond laser pulses

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