Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency inc...
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2021
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oai:doaj.org-article:6d527e0273114664a8dc0a71918abc612021-11-25T18:23:26ZModeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators10.3390/mi121113662072-666Xhttps://doaj.org/article/6d527e0273114664a8dc0a71918abc612021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1366https://doaj.org/toc/2072-666XPiezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.Wen WangJiahui WangRuijin WangZhanfeng ChenFuming HanKeqing LuChuanyong WangZhenlong XuBingfeng JuMDPI AGarticlepiezoelectric actuatordynamic hysteresiscoupling hysteresis modelhysteresis compensationPrandtl–Ishlinskii modelMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1366, p 1366 (2021) |
institution |
DOAJ |
collection |
DOAJ |
language |
EN |
topic |
piezoelectric actuator dynamic hysteresis coupling hysteresis model hysteresis compensation Prandtl–Ishlinskii model Mechanical engineering and machinery TJ1-1570 |
spellingShingle |
piezoelectric actuator dynamic hysteresis coupling hysteresis model hysteresis compensation Prandtl–Ishlinskii model Mechanical engineering and machinery TJ1-1570 Wen Wang Jiahui Wang Ruijin Wang Zhanfeng Chen Fuming Han Keqing Lu Chuanyong Wang Zhenlong Xu Bingfeng Ju Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
description |
Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system. |
format |
article |
author |
Wen Wang Jiahui Wang Ruijin Wang Zhanfeng Chen Fuming Han Keqing Lu Chuanyong Wang Zhenlong Xu Bingfeng Ju |
author_facet |
Wen Wang Jiahui Wang Ruijin Wang Zhanfeng Chen Fuming Han Keqing Lu Chuanyong Wang Zhenlong Xu Bingfeng Ju |
author_sort |
Wen Wang |
title |
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
title_short |
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
title_full |
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
title_fullStr |
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
title_full_unstemmed |
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators |
title_sort |
modeling and compensation of dynamic hysteresis with force-voltage coupling for piezoelectric actuators |
publisher |
MDPI AG |
publishDate |
2021 |
url |
https://doaj.org/article/6d527e0273114664a8dc0a71918abc61 |
work_keys_str_mv |
AT wenwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT jiahuiwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT ruijinwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT zhanfengchen modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT fuminghan modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT keqinglu modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT chuanyongwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT zhenlongxu modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators AT bingfengju modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators |
_version_ |
1718411203153231872 |