Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators

Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency inc...

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Autores principales: Wen Wang, Jiahui Wang, Ruijin Wang, Zhanfeng Chen, Fuming Han, Keqing Lu, Chuanyong Wang, Zhenlong Xu, Bingfeng Ju
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Lenguaje:EN
Publicado: MDPI AG 2021
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spelling oai:doaj.org-article:6d527e0273114664a8dc0a71918abc612021-11-25T18:23:26ZModeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators10.3390/mi121113662072-666Xhttps://doaj.org/article/6d527e0273114664a8dc0a71918abc612021-11-01T00:00:00Zhttps://www.mdpi.com/2072-666X/12/11/1366https://doaj.org/toc/2072-666XPiezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.Wen WangJiahui WangRuijin WangZhanfeng ChenFuming HanKeqing LuChuanyong WangZhenlong XuBingfeng JuMDPI AGarticlepiezoelectric actuatordynamic hysteresiscoupling hysteresis modelhysteresis compensationPrandtl–Ishlinskii modelMechanical engineering and machineryTJ1-1570ENMicromachines, Vol 12, Iss 1366, p 1366 (2021)
institution DOAJ
collection DOAJ
language EN
topic piezoelectric actuator
dynamic hysteresis
coupling hysteresis model
hysteresis compensation
Prandtl–Ishlinskii model
Mechanical engineering and machinery
TJ1-1570
spellingShingle piezoelectric actuator
dynamic hysteresis
coupling hysteresis model
hysteresis compensation
Prandtl–Ishlinskii model
Mechanical engineering and machinery
TJ1-1570
Wen Wang
Jiahui Wang
Ruijin Wang
Zhanfeng Chen
Fuming Han
Keqing Lu
Chuanyong Wang
Zhenlong Xu
Bingfeng Ju
Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
description Piezoelectric actuators are widely used in the field of micro- and nanopositioning due to their high frequency response, high stiffness, and high resolution. However, piezoelectric actuators have hysteresis nonlinearity, which severely affects their positioning accuracy. As the driving frequency increases, the performance of piezoelectric actuators further degrades. In addition, the impact of force on piezoelectric actuators cannot be ignored in practical applications. Dynamic hysteresis with force-voltage coupling makes the hysteresis phenomenon more complicated when force and driving voltage are both applied to the piezoelectric actuator. Existing hysteresis models are complicated, or inaccurate in describing dynamic hysteresis with force-voltage coupling. To solve this problem, a force-voltage-coupled Prandtl–Ishlinskii (FVPI) model is proposed in this paper. First, the influence of driving frequency and dynamic force on the output displacement of the piezoelectric actuators are analyzed. Then, the accuracy of the FVPI model is verified through experiments. Finally, a force integrated direct inverse (F-DI) compensator based on the FVPI model is designed. The experimental results from this study show that the F-DI compensator can effectively suppress dynamic hysteresis with force-voltage coupling of piezoelectric actuators. This model can improve the positioning accuracy of piezoelectric actuators, thereby improving the working accuracy of the micro- or nano-operating system.
format article
author Wen Wang
Jiahui Wang
Ruijin Wang
Zhanfeng Chen
Fuming Han
Keqing Lu
Chuanyong Wang
Zhenlong Xu
Bingfeng Ju
author_facet Wen Wang
Jiahui Wang
Ruijin Wang
Zhanfeng Chen
Fuming Han
Keqing Lu
Chuanyong Wang
Zhenlong Xu
Bingfeng Ju
author_sort Wen Wang
title Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_short Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_full Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_fullStr Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_full_unstemmed Modeling and Compensation of Dynamic Hysteresis with Force-Voltage Coupling for Piezoelectric Actuators
title_sort modeling and compensation of dynamic hysteresis with force-voltage coupling for piezoelectric actuators
publisher MDPI AG
publishDate 2021
url https://doaj.org/article/6d527e0273114664a8dc0a71918abc61
work_keys_str_mv AT wenwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT jiahuiwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT ruijinwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT zhanfengchen modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT fuminghan modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT keqinglu modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT chuanyongwang modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT zhenlongxu modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
AT bingfengju modelingandcompensationofdynamichysteresiswithforcevoltagecouplingforpiezoelectricactuators
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