Development of a local light stimulation device integrated with micro electrode array

In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated...

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Autores principales: Hidetaka UENO, Shoji KOMAI, Kyohei TERAO, Hidekuni TAKAO, Fusao SHIMOKAWA, Hidetoshi KOTERA, Takaaki SUZUKI
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Lenguaje:EN
Publicado: The Japan Society of Mechanical Engineers 2016
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Acceso en línea:https://doaj.org/article/6d7d90c6f9ae405a89bca3f40916d000
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spelling oai:doaj.org-article:6d7d90c6f9ae405a89bca3f40916d0002021-11-26T06:53:45ZDevelopment of a local light stimulation device integrated with micro electrode array2187-974510.1299/mej.15-00570https://doaj.org/article/6d7d90c6f9ae405a89bca3f40916d0002016-07-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/3/4/3_15-00570/_pdf/-char/enhttps://doaj.org/toc/2187-9745In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated by using organic materials such as polymer. The proposed fabrication method consists of photolithography and wet-etching process only. The shape of fabricated microlenses measured by a white light interferometer was the diameter of 111.5 μm, the depth of 45.5 μm, and the focal length 320 μm. The impedance of Platinum black electroplated on the fabricated electrode pads was reduced to 200 kΩ. As the results, it is succeeded to integrate electrode pads, microlenses and pinholes without plasma etching process. The fabricated dish is assembled with a light irradiation device having two LEDs. By the light irradiation test, the fabricated dish is expected to be utilized in a variety of neuroscience researches. By the test for cytotoxicity, it is succeeded to create neural network on the fabricated dish.Hidetaka UENOShoji KOMAIKyohei TERAOHidekuni TAKAOFusao SHIMOKAWAHidetoshi KOTERATakaaki SUZUKIThe Japan Society of Mechanical Engineersarticlemicrolensespolymerbio memsintegrated deviceneural networkMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 3, Iss 4, Pp 15-00570-15-00570 (2016)
institution DOAJ
collection DOAJ
language EN
topic microlenses
polymer
bio mems
integrated device
neural network
Mechanical engineering and machinery
TJ1-1570
spellingShingle microlenses
polymer
bio mems
integrated device
neural network
Mechanical engineering and machinery
TJ1-1570
Hidetaka UENO
Shoji KOMAI
Kyohei TERAO
Hidekuni TAKAO
Fusao SHIMOKAWA
Hidetoshi KOTERA
Takaaki SUZUKI
Development of a local light stimulation device integrated with micro electrode array
description In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated by using organic materials such as polymer. The proposed fabrication method consists of photolithography and wet-etching process only. The shape of fabricated microlenses measured by a white light interferometer was the diameter of 111.5 μm, the depth of 45.5 μm, and the focal length 320 μm. The impedance of Platinum black electroplated on the fabricated electrode pads was reduced to 200 kΩ. As the results, it is succeeded to integrate electrode pads, microlenses and pinholes without plasma etching process. The fabricated dish is assembled with a light irradiation device having two LEDs. By the light irradiation test, the fabricated dish is expected to be utilized in a variety of neuroscience researches. By the test for cytotoxicity, it is succeeded to create neural network on the fabricated dish.
format article
author Hidetaka UENO
Shoji KOMAI
Kyohei TERAO
Hidekuni TAKAO
Fusao SHIMOKAWA
Hidetoshi KOTERA
Takaaki SUZUKI
author_facet Hidetaka UENO
Shoji KOMAI
Kyohei TERAO
Hidekuni TAKAO
Fusao SHIMOKAWA
Hidetoshi KOTERA
Takaaki SUZUKI
author_sort Hidetaka UENO
title Development of a local light stimulation device integrated with micro electrode array
title_short Development of a local light stimulation device integrated with micro electrode array
title_full Development of a local light stimulation device integrated with micro electrode array
title_fullStr Development of a local light stimulation device integrated with micro electrode array
title_full_unstemmed Development of a local light stimulation device integrated with micro electrode array
title_sort development of a local light stimulation device integrated with micro electrode array
publisher The Japan Society of Mechanical Engineers
publishDate 2016
url https://doaj.org/article/6d7d90c6f9ae405a89bca3f40916d000
work_keys_str_mv AT hidetakaueno developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray
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