Development of a local light stimulation device integrated with micro electrode array
In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated...
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The Japan Society of Mechanical Engineers
2016
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oai:doaj.org-article:6d7d90c6f9ae405a89bca3f40916d0002021-11-26T06:53:45ZDevelopment of a local light stimulation device integrated with micro electrode array2187-974510.1299/mej.15-00570https://doaj.org/article/6d7d90c6f9ae405a89bca3f40916d0002016-07-01T00:00:00Zhttps://www.jstage.jst.go.jp/article/mej/3/4/3_15-00570/_pdf/-char/enhttps://doaj.org/toc/2187-9745In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated by using organic materials such as polymer. The proposed fabrication method consists of photolithography and wet-etching process only. The shape of fabricated microlenses measured by a white light interferometer was the diameter of 111.5 μm, the depth of 45.5 μm, and the focal length 320 μm. The impedance of Platinum black electroplated on the fabricated electrode pads was reduced to 200 kΩ. As the results, it is succeeded to integrate electrode pads, microlenses and pinholes without plasma etching process. The fabricated dish is assembled with a light irradiation device having two LEDs. By the light irradiation test, the fabricated dish is expected to be utilized in a variety of neuroscience researches. By the test for cytotoxicity, it is succeeded to create neural network on the fabricated dish.Hidetaka UENOShoji KOMAIKyohei TERAOHidekuni TAKAOFusao SHIMOKAWAHidetoshi KOTERATakaaki SUZUKIThe Japan Society of Mechanical Engineersarticlemicrolensespolymerbio memsintegrated deviceneural networkMechanical engineering and machineryTJ1-1570ENMechanical Engineering Journal, Vol 3, Iss 4, Pp 15-00570-15-00570 (2016) |
institution |
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collection |
DOAJ |
language |
EN |
topic |
microlenses polymer bio mems integrated device neural network Mechanical engineering and machinery TJ1-1570 |
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microlenses polymer bio mems integrated device neural network Mechanical engineering and machinery TJ1-1570 Hidetaka UENO Shoji KOMAI Kyohei TERAO Hidekuni TAKAO Fusao SHIMOKAWA Hidetoshi KOTERA Takaaki SUZUKI Development of a local light stimulation device integrated with micro electrode array |
description |
In this paper, we propose a simple plasma-less fabrication and integration method for biomicrodevice applications. For optogenetics, microlenses and pinholes irradiating local sight of biological tissue with focused visible light and electrodes measuring a biological electropotential are integrated by using organic materials such as polymer. The proposed fabrication method consists of photolithography and wet-etching process only. The shape of fabricated microlenses measured by a white light interferometer was the diameter of 111.5 μm, the depth of 45.5 μm, and the focal length 320 μm. The impedance of Platinum black electroplated on the fabricated electrode pads was reduced to 200 kΩ. As the results, it is succeeded to integrate electrode pads, microlenses and pinholes without plasma etching process. The fabricated dish is assembled with a light irradiation device having two LEDs. By the light irradiation test, the fabricated dish is expected to be utilized in a variety of neuroscience researches. By the test for cytotoxicity, it is succeeded to create neural network on the fabricated dish. |
format |
article |
author |
Hidetaka UENO Shoji KOMAI Kyohei TERAO Hidekuni TAKAO Fusao SHIMOKAWA Hidetoshi KOTERA Takaaki SUZUKI |
author_facet |
Hidetaka UENO Shoji KOMAI Kyohei TERAO Hidekuni TAKAO Fusao SHIMOKAWA Hidetoshi KOTERA Takaaki SUZUKI |
author_sort |
Hidetaka UENO |
title |
Development of a local light stimulation device integrated with micro electrode array |
title_short |
Development of a local light stimulation device integrated with micro electrode array |
title_full |
Development of a local light stimulation device integrated with micro electrode array |
title_fullStr |
Development of a local light stimulation device integrated with micro electrode array |
title_full_unstemmed |
Development of a local light stimulation device integrated with micro electrode array |
title_sort |
development of a local light stimulation device integrated with micro electrode array |
publisher |
The Japan Society of Mechanical Engineers |
publishDate |
2016 |
url |
https://doaj.org/article/6d7d90c6f9ae405a89bca3f40916d000 |
work_keys_str_mv |
AT hidetakaueno developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT shojikomai developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT kyoheiterao developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT hidekunitakao developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT fusaoshimokawa developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT hidetoshikotera developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray AT takaakisuzuki developmentofalocallightstimulationdeviceintegratedwithmicroelectrodearray |
_version_ |
1718409723708964864 |