Scalable high-precision tuning of photonic resonators by resonant cavity-enhanced photoelectrochemical etching
Aligning the resonances of sets of optical cavities is necessary for advanced photonics and sensing applications. Here, the authors introduce resonant photoelectrochemical etching as a method to collectively and permanently tune the resonant wavelengths of ensembles of resonators on a photonic chip.
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| Main Authors: | , , , , , , |
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| Format: | article |
| Language: | EN |
| Published: |
Nature Portfolio
2017
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| Subjects: | |
| Online Access: | https://doaj.org/article/6fda47adcb954c1f8e99f41e7ce07fd1 |
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